Smart Sensors: Manufacture, Functionalize, Power-up and Integrate

智能传感器：制造、功能化、通电和集成

• 批准号: RGPIN-2020-06053
• 负责人: Yavuz, Mustafa
• 金额: $ 3.35万
• 依托单位: University of Waterloo
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2021
• 资助国家: 加拿大
• 起止时间: 2021-01-01 至 2022-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=741002
• 关键词: Smart; Sensors; Manufacture; Functionalize; Power

The manufacturing and integration of autonomous and embedded sensors through a combination of micro-- and nano--systems technologies have been revolutionizing self--powered, high bandwidth devices for advanced manufacturing (AM), artificial intelligence (AI), Internet of Things (IoT), and health technologies. More specifically, nano- and micro-scale sensors are the building blocks for a vast range of applications, from health and environmental (such as gas, biomolecules, pressure, temperature) monitoring to wireless Internet services. As these devices have numbered in the tens of billions, the potential for disruptive innovation is immense. Integrating micro- and nano--sensors to portable circuit boards (PCBs) and their electro--mechanical packaging are very challenging. The integration and packaging of these devices require the multiple deposition of layers of different dielectrics and metals. The atomic mismatch between these layers increases electrical resistance, creates noise and reduces sensitivity, and increase detection time. Moreover, cost reduction, scale up, compatibility, volume production, self-powering, and simplicity are very valuable additions, in addition to, high responsivity, high sensitivity, and high selectivity [Yavuz "Materials Design, Fabrication, Packaging and Reliability of Nano and Micro-Electro-Mechanical Systems (N/MEMS)", Wiley, 2019]. The proposed sensors developed through this research have the potential to improve our quality of life such as safer food and water and health monitoring, and securer environment and neighborhood. Therefore, the technology developed to manufacture these green and smart sensors will enhance Canada's economy, society and environment within the next 10 years [Infrastructure Canada (IC) "Building a Better Canada: A Progress Report on the Investing in Canada plan 2016-2019"; "Rural Opportunity, National Prosperity: An Economic Development Strategy for Rural Canada"]. The proposed program aims to educate and train highly qualified personnel (HQP) for addressing the "gap in knowledge, expertise and training in connected technologies such as AM, AI and IoT" identified by IC. The program will create a unique environment for innovation that unleashes the potential of HQP to develop cutting edge sensors by providing them with "broad interdisciplinary training and knowledge" from network- to bio-sensing in manufacturing, integrating, packaging and testing. HQP will be `job ready' and able to transition to the workforce as engineers, project managers and technology specialists. HQP trained through this innovative program will maximize knowledge transfer to critically important Canadian industries and public sectors. The training will be focused on project management, communication, work ethic, safety, equity, diversity and inclusion, equal employment opportunity (EEO), and intellectual property regulations as well.

通过微系统和纳米系统技术的结合，自主和嵌入式传感器的制造和集成已经彻底改变了先进制造（AM），人工智能（AI），物联网（IoT）和健康技术的自供电，高带宽设备。 更具体地说，纳米级和微米级传感器是从健康和环境（如气体、生物分子、压力、温度）监测到无线互联网服务等广泛应用的基础。由于这些设备的数量已达数百亿，颠覆性创新的潜力是巨大的。将微型和纳米传感器集成到便携式电路板（PCB）及其机电封装是非常具有挑战性的。这些器件的集成和封装需要多层沉积不同的金属和金属层。这些层之间的原子失配增加了电阻，产生噪声并降低了灵敏度，并增加了检测时间。此外，成本降低，规模扩大，兼容性，批量生产，自供电和简单性是非常有价值的补充，此外，高响应度，高灵敏度和高选择性[Yavuz“纳米和微机电系统（N/MEMS）的材料设计，制造，包装和可靠性"，Wiley，2019]。通过这项研究开发的传感器有可能提高我们的生活质量，例如更安全的食品和水以及健康监测，以及更安全的环境和社区。因此，为制造这些绿色和智能传感器而开发的技术将在未来10年内增强加拿大的经济、社会和环境[加拿大基础设施（IC）“建设一个更美好的加拿大：2016-2019年加拿大投资计划进展报告”;“农村机会，国家繁荣：加拿大农村经济发展战略”]。该计划旨在教育和培训高素质人才（HQP），以解决IC确定的“AM，AI和IoT等互联技术的知识，专业知识和培训差距”。该计划将创造一个独特的创新环境，释放HQP的潜力，通过为他们提供“广泛的跨学科培训和知识”来开发尖端传感器，从制造，集成，包装和测试中的网络到生物传感。HQP将“做好工作准备”，能够过渡到工程师、项目经理和技术专家等工作队伍。通过这一创新计划培训的HQP将最大限度地将知识转移到至关重要的加拿大行业和公共部门。培训将侧重于项目管理，沟通，职业道德，安全，公平，多样性和包容性，平等就业机会（EEO）以及知识产权法规。