Fabrication, packaging and reliability of nano-electro-mechanical systems (NEMS) devices
Fabrication, packaging and reliability of nano-electro-mechanical systems (NEMS) devices
批准号:
RGPIN-2015-04703
负责人:
Yavuz, Mustafa
金额:
$1.82万
依托单位:
依托单位国家:
加拿大
项目类别:
Discovery Grants Program - Individual
财政年份:
2017
资助国家:
加拿大
项目状态:
已结题
起止时间:
2017-01-01 至 2018-12-31
中文摘要
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英文摘要
The proposed project aims to demonstrate that nano-bonded hybrid interconnections for instance using graphene with low contact resistance are competitive to copper, gold and silver micro-wire-bonded interconnections used in current NEMS and MEMS devices.
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会议论文
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项目类别:Discovery Grants Program - Individual
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资助金额:$1.82万
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项目类别:Discovery Grants Program - Individual
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资助金额:$1.82万
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