In situ SEM/FIB Nanomechanical Testing System

共同申请人正在申请资助，以购买一种设计用于扫描电子或双聚焦离子/扫描电子显微镜的纳米力学测试仪器。该仪器将用于微观到纳米尺度的圆柱体、悬臂或“薄”膜（例如，100微米厚）在显微镜内的拉伸、压缩或剪切的机械行为研究。该工具实现的关键步骤将是对较小体积的动态探测，这样在测试体积中就存在一个内部材料结构的控制特征，而不是像在普通测试样品中那样存在许多控制特征。这种特征可以是缺口、单裂纹、二次相（颗粒或沉淀）、孪晶界或滑移带。小批量将使用申请人可用的研究方法获得，如聚焦离子束工具和/或光刻工艺。可定制的纳米机械系统将允许皇后大学的研究人员以回答有关材料的问题所需的方式控制实验，而不受测试机器设计的限制。此外，在原位操作的SEM或FIB/SEM允许前所未有的连续观察应变行为。在与工业伙伴的合作下，我们将探索推动实验的动态应变和时间分辨率的情况，开发世界领先的新实验能力。研究结果将深入了解材料如何变形和失效，从而影响从运输行业到发电和储存等一系列安全关键工业应用。

The co-applicants are requesting funding to purchase a one-of-a kind nanomechanical testing instrument designed to be used in scanning electron or dual focused ion/scanning electron microscopes. The instrument will be used for mechanical behaviour studies of micro- to nanoscopic dimensioned cylinders, cantilevers or ‘thin’ films (e.g., 100 micrometer thick) in tension, compression or shear inside the microscope(s). The key step enabled by the tool will be the dynamic probing of smaller volumes, such that one controlling feature of the internal material structure is present in the tested volume, and not many, as is typical in common test samples. This feature could be a notch, a single crack, secondary phase (particle, or precipitate), a twin boundary or a slip band. The small volumes will be obtained using available research methods of the applicants such as focused ion beam tools and/or lithographic processes. The customizable nano-mechanical system will allow Queen’s researchers to control the experiments in the ways needed to answer questions about the materials, and not be limited by the design of the testing machine. Furthermore, in situ operation in a SEM or FIB/SEM allows unprecedented continuous observation of the straining behaviour. In collaboration with an industrial partner, we will explore situations that push the dynamic strain and time resolution of the experiments, developing a world-leading new experimental capability. The results will provide insight into how materials deform and fail, with impact on a host of safety-critical industrial applications, from the transport industry through to electricity generation and storage.