微腔-膜-沟道腐蚀自终止一次成型方法与单芯片单面加工的微流量传感器研究

微流量传感器广泛应用于生物医学、医疗诊断、化学分析等关系国计民生的重要领域。针对现有微流量传感器在能耗、成本、系统封装等方面存在的不足，提出实现"微腔-膜-沟道"腐蚀自终止一次成型技术和单芯片单面加工的微流量传感器这一新方案。针对释放窗口结构尺寸、位置拓扑、制备方法和工艺参数对单晶硅薄膜成型的影响，研究单面微机械单晶硅薄膜-腔体-沟道的一次成型技术，分析薄膜在多物理场下的失效机理，为单面体硅三维加工提供理论指导。建立微沟道结构尺寸与表面性质对流体流动特性和界面自由能影响机理的模型，优化沟道结构设计和流体流动特性，实现传感器高性能和低能耗。在此基础上，建立微流量传感器理论参数模型，研究流量传感器单芯片单面集成结构设计技术和制造方法，实现流量传感器微型化、低成本、IC工艺兼容和可SMT封装。最后开展相关性能分析和实验研究。本课题对拓展微机械加工技术，促进流量传感技术发展具有重要理论和现实意义。

At present, the micro-flow sensors are widely used in important areas of people's livelihood, such as biomedical, medical diagnostics, chemical analysis, etc. For the shortcomings of the existing micro-flow sensors in big structure size, high power consumption, high fabrication cost, complexly packaged into micro-fluidic system, and so on, in this project, a reasonable scheme to achieve the one-step forming technology of the microcavities-film-channel fabricated with self-stopped etch and fully front-side bulk-micromachined single-chip micro-flow sensor are proposed. Firstly, aim at the influence of the releasing mini-holes structure dimensions, location topology, fabrication techniques and process parameters to the formation of the hexagonal monocrystalline silicon thin-film, an one-step forming technique of the hexagonal single crystal silicon thin-film, micro-cavitie and micro-channel fabricated with single-wafer-based single-sided silicon bulk-micromachining is studied, and then, the failure mechanism of monocrystalline silicon thin-film is analyzed in multi-physics conditions. All of these researches would provided theoretical guidance for the single-wafer-based single-sided bulk-micromachined three-dimensional micro-structure. Secondly,the model of the influnence mechanism of the micro-channel structure dimensions and the surface property to microfluidic flow characteristics and the interfacial free energy is established, sequentially, the structural design of the micro-channel and microfluidic flow characteristics are optimized to achieve high performance and low power consumption for the proposed micro flow-sensors. Based on the above theoretical research, the theoretical parameter model of the micro-flow sensor is built, and then, the monolithically integrated micro-flow sensor structure design technique and the single-wafer-based single-sided silicon bulk-micromachining technology, used for fabricating proposed micro-flow sensors, are proposed and studied to realize micro-flow sensors miniaturization,low-cost,fabrication process being compatible with IC process and sensor bare-chips directly being packaged into micro-fluidic systems with low-cost SMT(Surface Mounting Technology). Finally, micro-flow sensors relevant performance analysis and experimental research would be carry out. In short, this subject would be important theoretical and practical significance for extending the silicon micromachining technology and promoting the development of micro-flow sensor technology.