Inversion-Based High-Speed/High-Precision Tracking for Scanning-Probe-Based Nanofabrication

扫描隧道显微镜（STM）是用于100nm以下结构精密光刻的重要纳米加工工具之一。作为一种制造工具，使用低扫描速度以牺牲吞吐量为代价来实现高精度。该项目将通过开发用于STM的高速/高精度扫描探头所需的理论和实验专业知识来提高吞吐量。该技术方法采用压电作动器动力学的非线性反演进行扫描路径跟踪，并反馈处理建模误差。研究的四个理论和实验部分是：(1)压电建模和降阶；(2)基于反转的控制设计；(3)利用基于反转的控制设计高速扫描路径以最小化振动；(4)反馈控制以稳定扫描路径并减少未建模动力学引起的误差。该项目的成功将提高当前微电子制造设备的生产率，并将使定位在10nm以下所需的下一代机器的设计成为可能。这将允许以更低的成本制造更高性能的微电子器件。

9612300 Devasia The scanning tunneling microscope (STM) is one of the important nanofabrication tools used for precision lithography of structures below 100 nm. As a manufacturing tool, high precision is achieved at the expense of throughput using low scanning speeds. This project will improve throughput by developing the theoretical and experimental expertise needed for high-speed/high-precision scanning probes for STM. The technical approach uses nonlinear inversion of the piezo actuator dynamics for scan path tracking, and feedback to handle the modeling errors. The four theoretical and experimental parts of the research are: (1) piezo modeling and order reduction, (2) inversion-based control design, (3) high speed scan path design using the inversion based control to minimize vibration, and (4) feedback control to stabilize the scan path and reduce errors attributed to unmodeled dynamics. Success of this project will increase the productivity of current microelectronics fabrication equipment, and will enable the design of the next generation of machines needed for positioning below 10 nm. This will allow the fabrication of higher performance microelectronic devices at lower cost.