Development of a High Stiffness/Large Travel Multiple Degrees of Freedom Magnetic Suspension Actuator

超精密制造系统成功的关键是工具致动技术的进步，这些技术提供了纳米精度的大工作空间体积的工具运动和高动态刚度。 磁悬浮执行器（MSA）的最新发展的特点是窄间隙操作和低动态刚度。 这导致了悬架致动器具有低工作空间体积的多自由度致动或具有低动态刚度的小（一个或两个）自由度的大行程。 本研究计划发展一种具有六自由度、大行程、高刚度、高带宽及奈米级轨迹追踪精度的微位移系统。 实现这一目标的方法包括两个基本组成部分：（1）开发磁致动技术，该技术基于动态力平衡为电磁铁的最佳位置提供合理的基础，以及（2）开发非线性控制策略，该策略利用非线性模型电磁场获得大行程。 MSA的发展是有价值的运动应用程序，需要与环境的动态交互。 MSA开发的精细运动控制和大行程特性具有在半导体制造中以高速度在大面积上对硅晶片进行精确电气和机械探测的潜力。 MSA的高刚度、高带宽特性对于超精密金属切削、非圆车削和微机械加工至关重要，在这些加工中，需要在高带宽下面对显著的外力时保持纳米级的跟踪精度。

Crucial to the success of ultra-precision fabrication systems are advancements in tool actuation technologies that provide large workspace volume of tool motion at nanometric accuracy with high dynamic stiffness. Recent developments in the Magnetic Suspension Actuator (MSA) are characterized by narrow gap operation and low dynamic stiffness. This has resulted in a suspension actuators that possess either multi-degree-of-freedom actuation with low workspace volume or large travel in small (one or two) degrees of freedom with low dynamic stiffness. This research plan is to develop an MSA with six degrees of freedom with large travel range, high stiffness, high bandwidth, and nanometric trajectory tracking accuracy. The approach to accomplish this goal consists of two basic components: (1) development of magnetic actuation technology that uses a rational basis for the optimal location of the electromagnets based on dynamic force balance, and (2) development of nonlinear control strategies that utilize nonlinear model of the electromagnetic field to obtain large travel. The development of MSA is valuable to motion applications which require dynamic interactions with the environment. The fine motion control and large travel properties of the MSA development has the potential of enabling accurate electrical and mechanical probing of the silicon wafers in semiconductor manufacturing over large areas at high velocities. High-stiffness, high-bandwidth properties of the MSA are critically important to ultra precision metal cutting, non-circular turning, and micromachining where nanometric tracking accuracy at high bandwidths in face of significant external forces is required.