CAREER: Development of a MEMS Testing Methodology

微机电系统（MEMS）是由成熟的VLSI批量制造工艺发展而来的微型机电传感器和执行器系统。MEMS设计工具和工艺技术的进步导致了MEMS应用的增长。本研究正在探索系统地解决MEMS质量问题的测试方法，并正在开发一种全面的MEMS测试方法。该方法采用MEMS工艺模拟来预测斑点污染对表面微机械传感器件物理性能的影响。受干扰的设备属性被映射到它们相应的故障行为，并用于分类异常行为的可能性和性质。由此产生的基于mems的故障模型用于开发测试策略，可测试性设计（DFT）技术和有效的缺陷诊断方法。此外，为常规CPU电路开发的测试方法，以及模拟和混合信号测试技术正在适应MEMS测试。

Micro-electro-mechanical Systems (MEMS) are miniature electro-mechanical sensor and actuator systems developed from the mature batch-fabricated processes of VLSI technologies. Advances in MEMS design tools and process technologies have resulted in a growth in MEMS applications. This research is exploring testing methodologies for systematically addressing issues of MEMS quality, and a comprehensive MEMS testing methodology is being developed. The approach uses MEMS process simulation to predict the effects that spot contamination has on the physical properties of surface micro-machined sensing devices. Perturbed device properties are mapped to their corresponding faulty behaviors and are used to classify the likelihood and nature of deviant behavior. The resulting MEMS-based fault models are used to develop testing strategies, design-for testability (DFT) techniques, and methods for effective defect diagnosis. Also, testing methods developed for regular CPU circuits, along with techniques from analog and mixed signal testing are being adapted to MEMS testing.