A Novel Manufacturing Process for Transparent Conducting Oxide Thin Films

透明导电氧化物（TCO）材料具有不寻常的能力，既可以传输可见光，又可以导电。 这种基本的电子材料在平板显示器和太阳能电池模块中作为透明电极得到了广泛的商业用途。这种独特材料的其他应用包括保护涂层、低辐射窗户玻璃和气体检测传感器。 本研究计画旨在发展电浆增强化学气相沈积法（PECVD）作为低温TCO合成的替代制造方法。 PECVD提供了优于当前处理技术的几个潜在优势。 最重要的是有机会将沉积温度降低到250 ℃以下。这一目标的实现将为在轻质、柔性聚合物基板上制造器件创造机会。 为了发展PECVD作为一种可靠的制造技术，我们计划采用原位计量加上非线性反馈控制。气体成分和薄膜特性将分别使用光学发射光谱和激光反射计进行真实的实时监测。 控制设计将通过非线性系统识别和半全局经验建模来开发。 模型开发的一个关键要素将依赖于材料特性的非原位评估。 这个跨学科的项目涉及两个部门，并通过科罗拉多矿业学院的太阳能和电子材料中心进行协调。 这项研究与工业界密切合作。

Transparent conducting oxide (TCO) materials possess the unusual ability to both transmit visible light and to conduct electricity. This basic electronic material finds widespread commercial use as transparent electrodes in flat panel displays and solar cell modules. Additional applications of this unique material include protective coatings, low-emissivity window glass, and gas detection sensors. This research project is to develop plasma-enhanced chemical vapor deposition (PECVD) as an alternative manufacturing approach for low temperature TCO synthesis. PECVD offers several potential advantages over current processing technologies. Foremost is the opportunity to reduce deposition temperatures to below 250C. Achievement of this goal will create opportunities for device fabrication on lightweight, flexible polymer substrates. In order to develop PECVD as a reliable manufacturing technology we plan to employ in-situ metrology coupled with nonlinear feedback control. Gas composition and film properties will be monitored in real time using optical emission spectroscopy and laser reflectometry, respectively. Control designs will be developed through nonlinear system identification and semi-global empirical modeling. A critical element of model development will rely on ex-situ evaluation of material properties. This interdisciplinary project involves two departments and is coordinated through the Colorado School of Mines' Center for Solar and Electronic Materials. This research is in close collaboration with industry.