Cross-Training Technicians and Engineers for Semiconductor Manufacturing

本项目是9850310项目下开始的工作的延伸。一个由三所大学（新墨西哥大学、亚利桑那州立大学和德克萨斯大学奥斯汀分校）和三个社区学院系统（阿尔伯克基技术职业学院、马里科帕县社区学院区和奥斯汀社区学院）组成的联盟正在实施技术人员和工程师的“交叉培训”，这些大学位于三个相邻的州，每个州都以半导体制造业为经济背景。在先前国家科学基金会的资助下，该联盟开发了一套由六个计算机培训（CBT）模块组成的套件，旨在将其集成到类似工厂的实验室和相关课程中，以共同培训技术人员和工程师。前六个模块包括光刻、金属化、实验设计、蚀刻、化学气相沉积和统计过程控制。在目前的项目中，该联盟正在(1)开发另外三个模块，包括氧化和扩散、掺杂和退火以及工厂动态；(2)在合作院校和社区学院对工程技术专业学生进行并行培训；(3)完成九个模块的全套评估。该项目建立在“交叉培训”技术人员和工程师的前提下，这样每个小组都能更好地理解对方的角色和技能，从而提高他们作为团队成员在实际工厂环境中的效率。该项目的CBT模块涵盖了基本的半导体单元工艺（光刻，金属化，蚀刻）及其设备需求，实验设计，以及从技术人员和工程师的角度来看的工厂级动态。这些模块包括交互式的、基于原理图的模拟器面板，用于选定的制造机器，以支持基于需求的、自上而下的学习范式。此外，这些模块有结构化的练习，需要技术人员和工程师之间的互动角色。文本、图形、动画、视频、模拟和练习的“并排”呈现使技术人员增强了对数学和科学的了解，并使工程师增强了对机器（工具）操作问题的了解。多媒体模块被设计成独立运行或耦合到一个多层次的制造模拟器包。它们可以满足真实、模拟或虚拟工厂式实验室的培训需求。

The project extends work begun under Award No. 9850310.A consortium consisting of three universities (University of New Mexico, Arizona State University, and University of Texas at Austin) and three community college systems (Albuquerque Technical Vocational Institute, Maricopa County Community College District, and Austin Community College) in three contiguous states, each of which has semiconductor manufacturing as an economic backdrop, is implementing "cross-training" of technicians and engineers.Supported by a previous NSF grant, the consortium developed a suite of six computer-based training (CBT) modules designed to be integrated into factory-like labs and related courses for co-training of technicians and engineers. The first six modules covered lithography, metalization, design of experiments, etch, chemical vapor deposition, and statistical process control. In the current project, the consortium is (1) developing three more modules covering oxidation and diffusion, doping and annealing, and factory dynamics; (2) deploying the modules in side-by-side training of engineering and technician students at the partnering universities and community colleges; and (3) completing the evaluation of the full suite of nine modules.The project is built around the premise that "cross-training" technicians and engineers, such that each group better understands the roles and skill sets of the other, will enhance their effectiveness as team members in real factory settings. The project's CBT modules cover basic semiconductor unit processes (lithography, metalization, etch) and their facility demands, design of experiments, and factory-level dynamics from both the technician's and the engineer's perspectives. The modules include interactive, schematic-based simulator panels for selected manufacturing machines, to support a need-based, top-down learning paradigm. In addition, the modules have structured exercises that require interactive roles between technicians and engineers. The "side-by-side" presentation of text, graphics, animations, videos, simulations, and exercises give technicians enhanced exposure to mathematics and science and give engineers enhanced exposure to machine (tool) operation issues. The multimedia modules are designed to operate stand-alone or coupled to a multi-level manufacturing simulator package. They can serve training needs in real, mock, or virtual factory-like labs.