Acquisition of a Deep Ultraviolet/Infrared Mask Aligner for Microscale/Nanoscale Device Research and Education

这份来自材料研究仪器项目的合同将允许堪萨斯大学（英国）获得一个深紫外/红外（UV/IR）掩模对准器。该仪器将支持五个不同小组的研究，以制造微米级和纳米级器件。这些器件包括超导薄膜和隧道结、半导体激光器和探测器、III-N器件和基于微芯片的电泳器件。此次收购将加强堪萨斯大学现有的材料研究基础设施，并将大大提高堪萨斯大学的纳米科学技术和材料研究竞争力。此外，该仪器将是一个优秀的教育和培训平台，为学习薄膜器件和集成电路制造技术提供了独特的机会。深紫外和红外灯是本次收购的关键特征。深紫外/红外掩模对准器的获得对于跨越物理和天文学、化学和石油工程以及药物化学系的研究项目至关重要。这些研究将对下一代信息、计算、半导体和制药技术的发展产生直接影响。这份来自材料研究仪器项目的合同将允许堪萨斯大学（英国）获得一个深紫外/红外（UV/IR）掩模对准器。该仪器将支持五个不同小组的研究，以制造微米级和纳米级器件。这些器件包括超导薄膜和隧道结、半导体激光器和探测器、III-N器件和基于微芯片的电泳器件。此次收购将加强堪萨斯大学现有的材料研究基础设施，并将大大提高堪萨斯大学的纳米科学技术和材料研究竞争力。此外，该仪器将是一个优秀的教育和培训平台，为学习薄膜器件和集成电路制造技术提供了独特的机会。深紫外和红外灯是本次收购的关键特征。深紫外/红外掩模对准器的获得对于跨越物理和天文学、化学和石油工程以及药物化学系的研究项目至关重要。这些研究将对下一代信息、计算、半导体和制药技术的发展产生直接影响。

This award from the Instrumentation for Materials Research program will allow the University of Kansas (UK) to acquire a deep ultraviolet/infrared (UV/IR) mask aligner. This instrument will support the research of five different groups for fabrication of micron-scale and nano-scale devices. These devices include superconducting thin films and tunnel junctions, semiconductor lasers and detectors, III-N devices, and microchip-based electrophoresis devices. This acquisition will enhance existing materials research infrastructure at KU and will greatly improve KU's nanoscience and technology and materials research competitiveness. In addition, the instrument will be an excellent education and training platform providing a unique opportunity to learn thin film device and integrated circuit fabrication technologies. Deep UV and IR lamps are critical features of the proposed acquisition. The acquisition of a deep UV/IR mask aligner is essential to research programs that span the Physics and Astronomy, Chemical and Petroleum Engineering, and Pharmaceutical Chemistry departments. These studies will have direct impact on the development of the next-generation of information, computing, semiconductors and pharmaceutical technology.This award from the Instrumentation for Materials Research program will allow the University of Kansas (UK) to acquire a deep ultraviolet/infrared (UV/IR) mask aligner. This instrument will support the research of five different groups for fabrication of micron-scale and nano-scale devices. These devices include superconducting thin films and tunnel junctions, semiconductor lasers and detectors, III-N devices, and microchip-based electrophoresis devices. This acquisition will enhance existing materials research infrastructure at KU and will greatly improve KU's nanoscience and technology and materials research competitiveness. In addition, the instrument will be an excellent education and training platform providing a unique opportunity to learn thin film device and integrated circuit fabrication technologies. Deep UV and IR lamps are critical features of the proposed acquisition. The acquisition of a deep UV/IR mask aligner is essential to research programs that span the Physics and Astronomy, Chemical and Petroleum Engineering, and Pharmaceutical Chemistry departments. These studies will have direct impact on the development of the next-generation of information, computing, semiconductors and pharmaceutical technology..