MRI: Acquisition of an Alinger and Bonder Instrument for Research

这项重大研究仪器(MRI)计划奖提供资金，用于购买组合精密对准系统和晶片键合机。仪器的对准器部分精确地对齐多个晶片和基板，并使它们接触。该仪器的焊接机部分永久地将对准的基板粘合在一起。该仪器将在马里兰大学用于微电子机械系统、集成光学、芯片规模和晶片级封装、3D互连和热压印方面的研究和教育。研究人员将生产微型涡轮发动机、生物医学药物输送系统、显微外科工具、用于冷却高密度电路的微泵和射频设备。晶片对晶片对准系统将永久位于一个新的11,000平方米的区域内。英国《金融时报》马里兰大学致力于微纳系统研究的多用户1000级洁净室设施，工程和应用科学大楼。马里兰大学晶片对晶片对准系统的可用性将有利于以下研究项目：微型涡轮机械、微燃烧、安全和武装微系统、微机械冷却结构、三维微机械、用于微流体的共轭聚合物薄膜和主动定位神经探头。这种设备还将通过向本科生和研究生提供在现代洁净室环境中使用最先进设备的实践培训来加强教育。机电工程系新开发的微系统本科和研究生课程也将在课堂项目中使用该仪器。该仪器还将协助马里兰大学与周边大学和国家实验室之间的研究和跨学科合作。

This Major Research Instrumentation (MRI) program award provides funding to acquire a combined precision alignment system and wafer bonder. The aligner part of the instrument precisely lines up multiple wafers and substrates and puts them into contact. The bonder portion of the instrument permanently bonds the aligned substrates together. This instrument will be used at the University of Maryland for research and education in micro-electro-mechanical systems, integrated optics, chip-scale and wafer-level packaging, 3D interconnections, and hot embossing. Researchers will produce micro-turbine engines, biomedical drug delivery systems, microsurgical tools, micro-pumps for cooling high-density circuitry, and radio frequency devices. The wafer-to-wafer alignment system will be permanently located in a new 11,000 sq. ft. multi-user class 1000 clean room facility, the Engineering and Applied Sciences Building, dedicated to micro- and nano-systems research at the University of Maryland.The availability of a wafer-to-wafer alignment system at the University of Maryland will benefit the following research projects: micro-turbomachinery, micro-combustion, safety and arming micro-systems, micromachined cooling structures, 3-dimensional micro-mechanisms, conjugated polymer films for microfluidics, and actively positioned neural probes. This equipment will also enhance education by making available to undergraduate and graduate students hands-on training on state-of-the-art equipment in a modern clean room environment. Newly developed undergraduate and graduate courses in microsystems in both the Electrical and Mechanical Engineering departments will also utilize this instrument for class projects. The instrument will also assist research and interdisciplinary collaboration between the University of Maryland and surrounding universities and national laboratories.