InP-based MEMS-tunable Optical Filters and Switches

该项目的目标是通过磷化铟波导和高反射单片水平反射镜的片上静电微机电驱动，开发和测试波长选择性宽调谐（1250-1650 nm）谐振微腔滤波器和开关，用于宽带光网络。这项工作建立在PI发起的实验研究的基础上，以确定InP作为微光机电系统（MOEMS）的合适材料，允许将有源和无源光电器件的单片集成提高到一个新的水平，这在传统的硅基MEMS中是不可能的。MEMS提供了一种简单而有用的宽波长调谐机制，通常上级相应的静态配置，通过在基于波导的低功率光子集成电路（PIC）中实现由两个高反射镜约束的可变长度微腔。这一事实有助于加速智能光网络的渗透，使其更接近消费者，以更快、更容易地访问信息，在包括教育、医疗和商业在内的所有领域产生广泛影响。电子束光刻深腐蚀亚微米复合反射镜结构的集成将促进MEMS与纳米技术的集成。拟议的研究将加强PI小组正在进行的基于InP的光学MEMS计划。PI监督一些本科生和研究生，其中大多数是美国公民。MSAL还接待了国际交换学生和高级研究科学家进行短期合作研究项目。共同PI是在UMD的妇女工程计划的成员，并定期指导各级学生（从中学到研究生院）。这些活动将直接影响UMD系统集成课程开发的性质，招募优秀学生（已经很明显），为学生创造实习机会，并通过区域MEMS联盟研讨会和最终评审期刊出版物将知识传播到更大的社区。

The objective of the project is to develop and test wavelength-selective widely tunable (1250-1650 nm) resonant microcavity filters and switches by on-chip electrostatic micro-electro-mechanical actuation of indium phosphide (InP) waveguides and highly reflective monolithic horizontal mirrors, for broadband optical networks. The work builds upon experimental research initiated by the PI to establish InP as a suitable material for micro-opto-electro-mechanical systems (MOEMS), permitting a new level of monolithic integration of active and passive optoelectronic devices, impossible in traditional silicon-based MEMS.Intellectual Merits: MEMS provide a simple and useful broad wavelength-tuning mechanism, often superior to the corresponding static configuration, by realizing variable-length microcavities bound by two highly reflective mirrors in waveguide-based low-power Photonic Integrated Circuits (PIC).Broader Impacts:Integrated MOEMS devices are inherently miniaturized and mass-producible; a fact that helps in accelerating the penetration of intelligent optical networks closer to the consumers for faster and easier access to information, leading to sweeping impact in all fields including education, healthcare, and commerce. The integration of e-beam-lithographically defined deep-etched sub-micron composite mirror structures would boost the integration of MEMS with nanotechnology. The proposed research will strengthen an ongoing InP-based Optical MEMS program in the PI's group. The PI supervises a number of undergraduate and graduate students, majority of whom are US citizens. MSAL has also hosted international exchange students and senior research scientists for short-term collaborative research projects. The co-PI is a member of the Women in Engineering program at the UMD, and regularly mentors students of all levels (from middle school to graduate school). These activities will directly impact the nature of system integration curriculum development at UMD, recruitment of outstanding students (already evident), creation of internship opportunities for students in industry, and dissemination of knowledge to a much larger community through the regional MEMS Alliance workshops and eventually, refereed journal publications.