Biophotonics: MEMS-Based Endoscopic Optical Confocal Imaging

在本项目中，提出了一种新的基于MEMS的OCM（u-OCM）成像系统。拟议的成像探头直径仅为5 mm。采用一种新型的大垂直位移（LVD）微致动器技术，实现了微透镜的快速扫描（1毫秒）和大的z轴可调范围（~2 mm）。本论文的主要任务是：1）研制Z轴行程至少为2 mm的LVD微致动器; 2）设计和制造LVD微镜和微透镜; 3）将LVD微镜和微透镜封装和组装成光纤成像探头; 4）在物理模型中测试成像探头。

0423557XieIn this project, a new MEMS-based OCM (u-OCM) imaging system is proposed. The proposed imaging probe will be only 5 mm in diameter. The fast scanning ( 1 millisecond) and large z-axis tunable range (~2 mm) of the employed microlens is enabled by a novel large-vertical-displacement (LVD) microactuator technique. The following tasks will be pursued: 1) to develop LVD microactuators with at least 2-mm z-axis travel range; 2) to design and fabricate LVD micromirrors and microlenses; 3) to package and assemble LVD micromirrors and microlenses into a fiberoptic imaging probe; and 4) to test the imaging probe in physical phantoms.