Collaborative Research: MEMS from Organized Mesoscale Architectures of Carbon Nanotubes

本研究的目的是利用微机电系统MEMS平台，利用高度定向的多壁碳纳米管驱动和传感的有组织的中尺度架构的中尺度组装。特别是，我们将在硅基MEMS结构上使用优先生长的碳纳米管来创建一类新的器件和微系统。碳纳米管- mems混合结构将通过Si/SiO2加工和独特的多向碳纳米管生长工艺相结合来制造。然后，我们将测量各种结构的机械驱动和响应动力学，包括悬臂，扭转梁，惰性和电化学活性环境中各种形状的膜，用于诸如基于电脉冲的触发和传感等应用。机械系统中的转导方案。这项工作的智力优势使得将单个碳纳米管的吸引特性转化为一种全新的“突破性”技术，即通过标准的微纳米加工在硅上制造基于纳米管介观结构的微器件。提出的研究有可能展示一种全新的“突破性”技术，为将碳纳米管集成到MEMS平台铺平道路，产生各种新的基于纳米技术的微器件致动器和传感器。更广泛的影响涉及许多教育水平的相互作用。通过先前在MESA（CA科学推广计划）的支持下建立的联系，PI和研究生和/或REU的资助计划访问初中的科学课程，并进行与纳米尺度研究相关的科学实验。这个新兴和令人兴奋的领域将作为我们推广活动的媒介，吸引聪明的高中生进入科学和工程领域。

The objective of this research is to harness mesoscale assemblies of organized mesoscale architectures of highly oriented multi-walled CNT's actuation and sensing using the microelectromechanical systems MEMS platform. In particular, we will create a new class of devices and microsystems using preferentially grown CNTs on Si-based MEMS structures. The CNT-MEMS hybrid structures will be fabricated by a combination of Si/SiO2 processing and a unique multidirectional CNT growth process. We will then measure the mechanical actuation and response dynamics of a wide variety of structures including cantilevers, torsion beams, membranes of various shapes in inert and electrochemically active environments for applications such as electrical-pulse based triggering and sensing. transduction schemes in mechanical systems. The intellectual merits of this work enable the translation of the attractive properties of individual CNTs into a completely new "break-through" technology of nanotube-mesostructrure-based microdevices on silicon via standard micro and nanofabrication. The proposed research has the potential to demonstrate a completely new "break-through" technology that will pave the path for integration of CNTs into MEMS platforms, yielding a variety of new nanotechnology-based microdevices actuators and sensors. The broader impacts involve interaction at many educational levels. Through connections previously established with the support of MESA(CA Science outreach program), the PI and the graduate students and/or REU's supported by this grant plan to visit science classes in the Junior high, and conduct science experiments related to nanoscale research. This newly emerging and exciting area will serve as a medium in our outreach activities to attract bright high-school students to science and engineering.