MRI: Acquisition of Step-and-Flash Lithography Tool for Nanometer-Scaled Surface Engineering

CBET-0820887坎宁安该提案由来自电气和计算机工程、机械科学和工程以及生物工程系的5名研究者和4名高级人员提交。PI，Brian Cunningham，电气工程博士，UIUC，1990年，电气和计算机工程副教授，在工业界工作近10年后加入了UIUC。他的工作得到了SRU Biosystems，NSF，DOD，NIH和Beckman Institute的支持，他拥有23项光学传感器和组件专利，以及20多项正在申请的专利。.拉希德巴希尔，博士从普渡大学，1992年，刚刚搬到UICU在2007年秋季作为布利斯教授电气和计算机工程%生物工程和MNTL的主任。Bashir博士拥有令人印象深刻的证书和来自NSF，NIH和NASA的支持。Ken-Yung Cheng，斯坦福大学电气工程博士，1975年，电气和计算机工程教授，DARPA大学超均匀纳米光子技术光子学研究中心主任。肯特乔奎特，材料科学博士从威斯康星大学麦迪逊分校，1990年，加入电气和计算机工程的UIUC系在AT T和桑迪亚国家实验室近10年的经验后，于2000年。他的光子学研究得到了NSF和DARPA的支持。James科尔曼，1975年从UIUC获得电子工程博士学位，电气和计算机工程以及材料科学与工程教授，发表了大量论文，并拥有6项专利。高级研究员Nicholas Fang、米尔顿冯、Placid Ferreira和William King（NSF CAREER和DOE PECASE获奖者）也获得了充足的资金。总的来说，领导这项工作的团队是杰出的。10个研究项目，除了一个项目外，目前都得到了NSF、NIH、NASA、ONR或DARPA的支持，详细描述了如何获得拟议的光刻设备，这将使压印更快，更大的面积，将有利于研究工作。

CBET-0820887CunninghamThe proposal was submitted by 5 Investigators and 4 Senior Personnel from the departments of Electrical and Computer Engineering, Mechanical Science and Engineering and Bioengineering. The PI, Brian Cunningham, PhD in Electrical Engineering, UIUC, 1990, Associate Professor of Electrical and Computer Engineering, joined the UIUC faculty after nearly 10 years in industry. His work is supported by SRU Biosystems, NSF, DOD, NIH and the Beckman Institute and he has 23 patents awarded for optical sensors and components and more than 20 patents pending. . Rashid Bashir, PhD from Purdue, 1992, just moved to UICU in the fall of 2007 as the Bliss Professor of Electrical and Computer Engineering % Bioengineering and the Director of MNTL. Dr. Bashir has impressive credentials and support from NSF, NIH and NASA. Ken-Yung Cheng, PhD in Electrical Engineering from Stanford, 1975, Professor of Electrical and Computer Engineering, is the Director of the DARPA University Photonics Research Center for Hyper-Uniform Nanophotonic Technology. Kent Choquette, PhD in Materials Science from the University of Wisconsin-Madison, 1990, joined the UIUC Department of Electrical and Computer Engineering in 2000 after nearly 10 years of experience at AT&T and Sandia National Labs. His photonics research is supported by NSF and DARPA. James Coleman, PhD in EE from UIUC, 1975, Professor of Electrical and Computer Engineering and Materials Science and Engineering, has published extensively and holds 6 patents. The Senior Investigators, Nicholas Fang, Milton Feng, Placid Ferreira and William King (NSF CAREER and DOE PECASE awardee), are likewise well funded. In general, the team leading this effort is outstanding. Ten research projects, with all but one currently receiving support from NSF, NIH, NASA, ONR, or DARPA, were described in some detail including information about how access to the proposed lithography equipment, which would enable imprinting more quickly and of larger areas, would benefit research efforts.