High Temperature Electronic Devices Based on Wide Bandgap Thin Films

本研究的目的是合成和表征适用于高温电子器件制造的非掺杂高阻薄膜和p、n掺杂多晶金刚石和AlN半导体薄膜，并研究硅器件不适用的高温微电子器件的制备。该方法包括用微波等离子体增强化学气相沉积方法合成金刚石薄膜，并测量其电性能和机械性能。研究了工艺参数对薄膜成分、结晶质量、机械强度和电学性能的影响。先进的材料表征技术将被用来表征纳米级的微结构，这将与薄膜的性能有关。电学性质，如I-V和C-V行为以及载流子浓度，将在一定的温度范围内进行测量。杨氏-S模数将在现有的迈克尔逊干涉仪系统上测量。将研究肖特基二极管、压力传感器和电压倍增器堆栈等器件的制造。在更广泛的范围内，拟议的研究具有巨大回报的潜力，通过为飞机、航天器、汽车和核反应堆开发运行温度高于500摄氏度的电子产品，从而降低发动机维护成本，并提高可靠性和性能效率。这项研究的一个基本而重要的组成部分将是为研究生、博士后和本科大四学生提供教育和培训。此外，少数族裔/妇女和高中生将通过我们大学的项目得到指导和接触到这项研究。一个重要的扩展到高中的提议被提出了。

The objectives of this research are to synthesize and characterize thin films of high resistivity undoped, and semi-conducting p- and n-doped polycrystalline diamond and AlN thin films suitable for the fabrication of high temperature electronic devices, and to investigate the fabrication of high temperature microelectronic devices where silicon devices are not useful. The approach consists of synthesis of diamond films by microwave plasma enhanced chemical vapor deposition and measurement of their electrical and mechanical properties. The influence of process parameters on the composition, crystal quality, mechanical strength, and the electrical properties of the films will be studied. Advanced materials characterization techniques will be used to characterize nanoscale microstructure, which will be related to the properties of the films. Electrical properties such as I-V and C-V behaviors and carrier concentration will be measured over a range of temperatures. Young?s moduli will be measured on existing Michelson interferometer system. Fabrication of devices such as Schottky diodes, pressure sensor, and a voltage multiplier stack will be investigated. On a broader scale, the proposed research has potentials for enormous payoffs by developing electronics for operation above 500oC for aircraft, spacecraft, automobiles and nuclear reactors thereby reducing engine maintenance costs, and improving reliability and performance efficiencies. An essential and important component of this research will be to provide education and training of graduate students, post-docs, and undergraduate seniors. In addition, minority/women and high school students will be mentored and exposed to this research through programs at our university. A significant outreach to high schools is proposed.