Development of Scanning Near Field Ultrasound Holography with Integrated Electronic Detection for Sub-Surface Nanomechanical Imaging

NSF ECCS-0925882大量的现代物理和生物结构和设备需要工具和技术来查看表面以下，非破坏性和纳米级分辨率。关于“非破坏性”真实空间成像，在由共焦/光子或声学/超声技术（微米尺度）和SPM（纳米和亚纳米尺度）提供的两个长度尺度范围之间存在明显的空隙。 如果感兴趣的特征更深地埋在材料中，超出近端探针的相互作用范围，则尤其如此。 该项目涉及开发一种扫描近场超声全息（SNFUH），集成了电子反馈和驱动系统，用于对掩埋的纳米结构进行成像和模式识别。该项目的智力价值解决了许多未满足的次表面成像工具集的需求。该项目研究包括微机电系统（MEMS）方法，扫描探针显微镜（SPM），声全息与全电子反馈方法相结合的创新组合;使大规模并行金属氧化物半导体场效应晶体管（MOSFET）嵌入式微悬臂梁平台快速交钥匙成像工具集。通过将传统SPM的纳米级空间分辨率与声学或超声显微镜的弹性成像能力相结合，电子检测SNFUH项目有望满足表征和研究纳米级系统的静态和动态力学的关键需求。该项目的更广泛影响有望为非破坏性高分辨率显微镜成像开辟新的前景，用于半导体材料和器件中的掩埋纳米结构，缺陷，分层和次表面图案识别。教育计划的重点是（1）开发软结构纳米力学的教学模块，包括实验室演示和课堂教程;（2）与研究目标相关的本科生和RET（教师研究经验）个人项目模块。教育目标将通过以下方式实现：（a）提供实践和团队经验，以促进积极和协作学习;（B）使有前途的本科生有机会在新兴的纳米力学领域进行研究，以及（iii）通过MIN招募和留住传统上代表性不足的学生（少数民族实习纳米技术）计划，为本科生提供机会，参与纳米技术领域的实践研究。 总的来说，该项目将试图解决未满足的技术要求，在新兴的纳米电子学和纳米生物电子学的国家关键的重要领域成像埋缺陷/结构。预计该项目还将对教育和培训需求产生积极影响;为美国学生提供多样化的教育和社会外联举措;特别关注代表性不足的群体。

NSF ECCS-0925882A large number of modern physical and biological structures and devices require tools and techniques to see below surfaces, non-destructively and with nanoscale resolution. With respect to "non-destructive" real-space imaging, there is a clear void between the two ranges of length-scales offered by confocal / photon or acoustic/sonography techniques (micrometer scale) and SPM (nano- and sub-nanometer scale). This is particularly true if features of interest are buried deeper into the material, beyond the interaction range of proximal probes. The project concerns development of a Scanning Near field ultrasound holography (SNFUH) with integrated electronic feedback and actuation system for imaging buried nanostrucures and pattern recognition.The Intellectual Merit of the project addresses many unmet needs for sub-surface imaging tool-set. The project research comprises an innovative combination of micro-electro-mechanical systems (MEMS) approach, scanning probe microscopy (SPM), acoustic holography integrated with all-electronic feedback approach; to enable massively parallel metal-oxide semiconductor field-effect transistor (MOSFET) embedded microcantilever platform for rapid turn-key imaging tool-set. By combining the nanometer-scale spatial resolution of conventional SPMs with the elastic imaging capabilities of acoustic or ultrasonic microscopes, the electronic detection SNFUH project is expected to fill the critical need in characterizing and investigating the static and dynamic mechanics of nanoscale systems. The Broader Impact of the project promises to open new vistas in non-destructive high resolution microscopy for imaging buried nanostructures, defects, delaminations and sub-surface pattern recognition in semiconducting materials and devices. The education plan focuses on (1) development of a teaching module in nanomechanics of soft and structures which includes hand-on-laboratory demo and classroom tutorials; (2) Undergraduate and RET (research experience for teachers) individual project modules correlated with research goals. The educational objectives will be achieved by (a) providing hand-on, team experience to promote active and collaborative learning; (b) exposing promising students at the undergraduate level to research opportunities in emerging field of nanomechanics, and (iii) to recruit and retain traditionally under-represented students though MIN (Minority Internships in Nanotechnology) programs which provide opportunities for undergraduates to participate in hands-on research in the area of nanotechnology. Collectively, the project will attempt to address the unmet technology requirements for imaging buried defects/structures in nationally critical important fields of emerging nano-electronics and nano-bio-electronics. The project is also expected to positively impact educational and training needs; by providing diverse educational and societal outreach initiatives for American students; with a particular focus on underrepresented groups.