MRI-R2: Acquisition of Electron Beam Writer for Southern California Recovery Investment in Nanotechnology (SCRIN)

摘要本研究的目的是研究纳米级结构的基本电子、光子、化学和生物行为，这些行为与下一代存储、能量收集、通信和计算、量子通信和信息处理、超导以及生物医学和生物化学传感的未来应用相关。该方法是利用纳米级电子束光刻技术与其他纳米制造技术相结合来制造和表征纳米级超材料、器件和子系统，其中这些新的行为有望最清楚地体现出来，并可以被利用。知识价值：与目前的实验相比，此次收购将使研究更小的结构、更精细的特征和更大的模式成为可能。电子和自旋扩散，各种磁性行为，结构和化学变化，超导退相干，和许多其他现象发生在纳米尺度的普通材料将被探索。在纳米光子学、超材料、量子光学、量子信息、纳米医学等领域也规划了研究项目。更广泛的影响：通过纳米科学技术的进步创造财富是21世纪经济的核心。其影响跨越多个技术领域，包括信息系统、医疗保健、能源、污染监测以及用于国土安全应用的化学威胁和爆炸物检测。加州大学圣地亚哥分校的Nano3设施为南加州的广大地区提供服务，拟议的工具将使整个地理区域的用户受益。该项目还将在促进研究生和本科生一级科学和工程人力资源的教育和发展、多样性和外联方面发挥重要作用。

"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)" AbstractThe objective of this research is to study fundamental electronic, photonic, chemical, and bio-logical behaviors of nanoscale structures relevant to future applications in next generation storage, energy harvesting, communications and computing, quantum communication and information proc-essing, superconductivity, and biomedical and biochemical sensing. The approach is to utilize nano-scale e-beam lithography in conjunction with other nanomanufacturing technologies to fabricate and characterize nanometer scale metamaterials, devices, and subsystems in which these new behaviors are expected to manifest themselves most clearly and can be exploited.Intellectual merit: The proposed acquisition will enable investigation of smaller structures, finer features, and larger patterns than can be experimentally accessed today. Electronic and spin dif-fusion, a variety of magnetic behaviors, structural and chemical changes, superconducting decoher-ence, and many other phenomena that occur at nanometric length scales in common materials will be explored. Research projects are also planned in the areas of nanophotonics, metamaterials, quantum optics, quantum information, and nanomedicine.Broader Impact: The creation of wealth through advances in nanoscale science and technol-ogy is at the heart of the 21st century economy. The impacts span multiple technical fields, including information systems, health care, energy, pollution monitoring, and chemical threat and explosive detection for homeland security applications. The UCSD Nano3 facility is serving a wide area of Southern California, and the proposed tool will benefit users throughout this geographic area. The project will also play a significant role in promoting education and development of human resources in science and engineering at the graduate and undergraduate levels, diversity and outreach.