Volatile Transition Metal Compounds with New Ligand Archetypes: Exploratory Synthesis, Small Molecule Reactivity, and Use as Molecular Precursors

该项目由伊利诺伊大学化学系的Gregory S. Girolami教授资助，由化学系化学合成项目资助，将探索几种电子材料分子前体的合成。该项目涉及新化合物的合成、化学反应性的研究以及作为薄膜前体的挥发性和实用性的研究。目前项目的一些具体目标是开发晚期过渡元素的挥发性双配位氨基配合物，以及与化学气相沉积（CVD）和二烷基酰胺配体化学相关的脱烷基反应的机理研究。与此同时，将利用一类通式为NR2(BH3)2-的新型螯合硼氢化物配体，对金属硼化物和金属氧化物的新型CVD前体进行研究。更广泛的影响包括培养本科生、研究生和博士后研究人员，并通过纳入来自代表性不足群体的研究人员来扩大参与。这项工作将为化学气相沉积（CVD）和原子层沉积（ALD）薄膜生长提供更好的分子前驱体。这种化学反应将对微电子工业的关键问题产生影响，并可能为计算机和其他电子设备带来速度更快、性能更强的微处理器。此外，该项目将为学生提供优秀的培训，从本科预科到博士后，包括那些来自历史上在科学领域代表性不足的群体。

In this project funded by the Chemical Synthesis Program of the Chemistry Division, Professor Gregory S. Girolami of the Department of Chemistry of the University of Illinois will explore the synthesis of several classes of molecular precursors for electronic materials. The project involves the synthesis of new compounds, investigations of their chemical reactivities, and studies of their volatilities and utilities as thin film precursors. Some of the specific objectives of the current project are the development of volatile two-coordinate amido complexes of the late transition elements, and mechanistic studies of dealkylation reactions that are relevant both to chemical vapor deposition (CVD) and to the chemistry of dialkylamide ligands. In parallel, investigations of new CVD precursors for both metal borides and metal oxides will be carried out, using a new class of chelating borohydride ligands of the general formula NR2(BH3)2-. The broader impacts involve training undergraduate students, graduate students, and postdoctoral researchers, and broadening participation through the inclusion of researchers from underrepresented groups on the project. This work could lead to the development of better molecular precursors for chemical vapor deposition (CVD) and atomic layer deposition (ALD) growth of thin films. Such chemistry will have an impact on critical problems in the microelectronics industry, and could lead to faster and more capable microprocessors for computers and other electronic equipment. In addition, this project will provide excellent training of students, from pre-undergraduate to post-doctoral, including those from groups historically underrepresented in the sciences.