I-Corps: A Technology for Complementary Metal-Oxide Semiconductors (CMOS)-Integrated Vapor Sensors

I-Corps项目更广泛的影响/商业潜力将是一种新的高灵敏度蒸汽传感技术的开发和商业化。该技术具有几个优点，包括低功耗和高灵敏度，这使得它可以集成到一系列持久的、无线的、便携式的和自主的监测应用中。这些蒸汽传感器有望应用于广泛的领域，包括农业、威胁检测、健康、室内空气质量、污染物分析和工业化学品安全。预计开发的技术将进一步影响一系列领域，从而显著改善农产品质量、公共卫生和安全、室内气候控制效率以及广泛的医疗技术。I-Corps项目的基础是开发一种高灵敏度、微加工质量传感器，该传感器采用先进的传感器材料，以创造低成本、低功耗的蒸汽传感系统。所提出的结构直接在互补金属氧化物半导体（CMOS）集成芯片（IC）的后端制造高频体声谐振器，进一步改善了传感器的噪声特性。提出的直接集成方法简化了体声波蒸汽传感器的结构，允许更少的噪声，并减少了结构中存在的寄生效应。直接协整还允许制造一系列质量传感器，从而允许创建电子鼻，其中对多个受体的响应可用于对蒸汽材料进行分类，并减少非特异性响应的影响。硅集成电路还可以补偿热漂移，进一步改善本底噪声。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this I-Corps project will be the development and commercialization of a new highly sensitive technology for vapor sensing. This technology offers several advantages, including low power draw and high sensitivity, which allows for its integration in a range of persistent, wireless, portable, and autonomous monitoring applications. These vapor sensors are anticipated to have application to a wide range of fields including agriculture, threat detection, health, indoor air quality, analysis of pollutants, and industrial chemical safety. The developed technology is further expected to impact a range of fields leading to significant improvements in the quality of agricultural products, public health and safety, the efficiency of indoor climate control, and a broad range of medical technologies. This I-Corps project is based on the development of a high sensitivity, microfabricated mass sensor functionalized with advanced sensor materialsto create low-cost, low-power vapor sensing system. The proposed architecture fabricates a high frequency bulk acoustic resonator directly on the back-end of a Complementary Metal-Oxide Semiconductors (CMOS)-Integrated Chip (IC), which further improves the noise characteristics of thesensor. The direct integration approach proposed simplifies the architecture for bulk acoustic wave vapor sensors, allows for less noise, and reduces the parasitics present in the structure. The direct co-integration also allows for the fabrication of an array of mass sensors that permits the creation of an electronic nose, in which the response to multiple receptors can be used to classify vapor materials and reduce the effect of nonspecific responses. The silicon IC also may compensate for thermal drift, further improving the noise floor.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.