Development of Recycling Technology of Unused Wastes

包括液体、固体和气体在内的各种尚未用于转化为可变材料的工业废物是本研究的目标。我们重点研究了回收技术和处理技术，使其无害化。硅片生产过程和液晶显示器生产过程中排放的废酸混合液、废feel蚀刻液、其他含金属离子的废液等作为液体废物、铝回收厂的铝渣、燃煤电厂的煤粉煤灰、汽车碎纸机渣、啤酒厂的啤酒渣、酱油渣作为固体废物；干蚀刻工艺中使用的NF_3、BC1_3等气体和氟利昂等气体废弃物作为制冷剂介质，尚未用于转化合适的材料。进行这项研究是为了开发使废物有价值的技术，换句话说，是为了建立零排放的过程。从环境友好的角度对这些技术进行了评价。在三年的研究中，我们建立了这些废物的回收技术和无害化处理技术。特别是对废酸混合物和食品工业废弃物进行了基础研究，并进行了与实际处理厂非常接近的示范试验。本研究获得的研究成果可以应用于其他尚未转化为可变材料的废物。

Various industrial wastes including liquid, solid and gas, which are not yet used for transforming to variable materials, are targeted on this research. We focused on the reclamation technology and the treatment technology to make them harmless. Waste acid mixture discharged from silicon wafer production process and liquid crystal display production process, and waste Feels etching solution, other waste solution containing metal ions etc. as liquid wastes, aluminum dross from aluminum reclamation plant, coal fly ash from coal electric power plant, automobile shredder residue, beer lees from beer brewery and soy sauce lees as solid wastes, gases used in dry-etching process such as NF_3 and BC1_3 and Freon for refrigerant media as gas wastes are not yet used for transforming suitable materials. This research was carried out in order to develop the technologies to make the wastes valuable or in other words to establish the process to be zero-emission. These technologies were evaluated from the viewpoint of environmentally friendly process.During three year research period, we established the reclamation technology of these wastes and the treatment technology to make them harmless. Especially, the fundamental study was performed as well as demonstration tests which were very close to the actual treatment plants for waste acid mixture and food industry wastes. The research results obtained in this study could be applied to other wastes which are not yet used for transforming to variable materials.