Precision Lapping of Substrata Such As Aluminum, etc. by Fixed Abrasives

为了弥补游离磨料研磨工艺在精密光整加工中的不足，针对固着磨料（主要是PVA粘结磨料）的一种新的应用，探讨了它的用途。[1]测定和估算了聚乙烯醇磨具的硬度、弹性模量等力学性能。最重要的是，接下来的几点是重要的，并从理论和实验的角度进行了定量讨论。(1)机械特性的值在很大程度上取决于干燥或潮湿的条件。(2)PVA固结磨料的工作表面和内部硬度存在较大的差异。(3)固结磨料工作表面硬度的变化对几何精度有很大的影响。[2]在固着磨料研磨过程中，研磨特性的时序变化是不可避免的。[3]在固着磨料研磨中，保证研磨盘几何精度的重要因素之一是尽可能长时间地保持研磨盘的高精度平面度。[4]通过实验研究了固着磨料加工中表面粗糙度的产生机理，并将其分为三种类型。(1)复制型（2）中间型（3）抛光型

For the purpose of making up the weak points of free abrasive lapping processing which have been widely used so far as the precision finishing processing, a new application of fixed abrasives (here, PVA bonded abrasives are taken up mainly) was aimed at and its utility was discussed. The results obtained here are summarized as follows :[1] Such mechanical characteristics of PVA bonded abrasives as hardness, modulus of elasticity and so on were measured and estimated. Above all, next points are important and quantitatively discussed from both theoretical and experimental view points.(1) The values of the mechanical characteristics depends quite a lot on dry or wet condition.(2) There exists considerable variance in hardness on its working surface and inside of PVA fixed abrasives.(3) The variance of the hardness on the working surface of fixed abrasives influences geometrical accuracy considerably.[2] In fixed abrasives lapping, time-series change of lapping characteristics can not be avoidable.[3] One of the most important factors which rule the geometrical accuracy in fixed abrasives lapping is to maintain highly trued flatness of a lapping plate as long as possible.[4] The generation mechanism of surface roughness in the fixed abrasives processing was investigated experimentally and classified into next three types.(1) Copied type(2) Intermediate type(3) Burnishing type