NSF-DFG: Advances in ion-surface interaction-driven manufacturing of one-dimensional metal oxide heterostructures

该提案致力于探索通过斜角沉积和辅助离子轰击（iGLAD）原理反应生长空间相干，均匀和高质量化合物一维纳米异质结构的先进制造方法。实施到制造工艺中的一个辅助离子源将依次操作用于i）经由离子侵蚀的衬底预图案化，ii）经由反应离子轰击的相位和化学计量控制，以及iii）经由离子成形的纳米结构尺寸控制。采用假设驱动的方法，研究成核，生长，界面形成，表面图案化和纳米结构工艺的相关工艺参数，如离子能量，离子电流密度，入射角和离子质量的金属氧化物纳米异质结构的制造，使用ZrO 2-MoO 3-x作为模型物质。在任意样品位置的原位光谱椭圆偏振法将被应用于实时监控制造过程中的材料发展。制造工艺的进步伴随着对离子辅助生长过程中所涉及的粒子通量的全面分析，以及对沉积期间的粒子输运的基于蒙特-卡罗的模拟。如果成功的话，一个修改后的桑顿图的微观结构演变在1D纳米结构作为离子轰击和倾斜粒子通量的函数将被建立。该提案基于双方对先进增材制造的低能反应离子束处理的共同科学兴趣，并结合了内布拉斯加大学林肯分校副教授伊娃舒伯特博士（美国）的专业知识。Frank Frost博士，莱布尼茨表面工程研究所（德国）离子束辅助图案化和平滑部负责人。高分辨率STEM成像结合EDX元素分析将由IOM分包商Fraunhofer-Institute for Microstructures of Materials and Systems（Halle/Saale，德国）的混合系统团队经理René Feder博士进行。

This proposal is dedicated to the exploration of advanced manufacturing methods for the reactive growth of spatially coherent, homogeneous, and high-quality compound one-dimensional nano-heterostructures by principles of oblique angle deposition and assist ion bombardment (iGLAD). One assist ion source implemented into the fabrication process will be subsequentially operated for i) substrate pre-patterning via ion erosion, ii) control of phase and stoichiometry via reactive ion bombardment, and iii) nanostructure size control via ion figuring. A hypothesis driven approach is employed to investigate nucleation, growth, interface formation, surface patterning and nanostructure crafting for the fabrication of metal oxide nano-heterostructures in correlation to process parameters such as ion energy, ion current density, angle of incidence and ion mass, using ZrO2-MoO3-x as a model substance. In-situ spectroscopic ellipsometry at arbitrary sample positions will be applied to monitor material development during manufacturing in real-time. The advancements of the fabrication process are accompanied by a comprehensive analysis of particle fluxes which are involved in the ion assisted growth process, and by Monte-Carlo based simulations of the particle transport during deposition. If successful, a modified Thornton diagram of microstructure evolution in 1D nanostructures as a function of ion bombardment and oblique particle fluxes will be established. This proposal is based on mutual scientific interest in low-energy reactive ion beam processing for advanced additive manufacturing and combines expertise from Dr. Eva Schubert, Associate Professor at the University of Nebraska-Lincoln (U.S.A.) and Dr. Frank Frost, Head of Division for Ion Beam Assisted Patterning and Smoothing at the Leibniz-Institute for Surface Engineering (Germany). High resolution STEM imaging in combination with EDX elemental analysis will be conducted by Dr. René Feder, Team Manager Hybrid Systems, from IOM sub-contractor Fraunhofer-Institute for Microstructures of Materials and Systems in Halle/Saale (Germany).