Effects of liquid organic compounds on health used in semiconductor manufacturing processes

由于四乙氧基硅烷的食用量最大，毒性资料较差，本文首先研究了四乙氧基硅烷[TEOS，Si(OC_2H_5)_4]对ICR雄性小鼠的毒性。TEOS腹腔给药研究显示LD_<50>约为500mg/kg，靶器官为肾脏，表现为急性肾小管坏死（ATN）和肾小管间质性肾炎（TIN）。急性吸入试验（1000ppm TEOS 1、2、4、8小时）表明LD_<50>（4小时）大于1000ppm，肾脏和鼻黏膜是靶器官。亚急性吸入研究（200、100或50 ppm的TEOS，每天6小时，每周5天，持续2或4周）表明，TEOS对肾脏的无影响水平为50 ppm，对鼻腔的无影响水平小于50 ppm。根据这些结果，暴露水平应严格控制在10ppm（目前推荐的暴露限值）以下，并应评估和监测长期暴露于teos的工人的肾小管功能。TEOS对肾脏影响的时间过程研究表明，TEOS服药后12小时肾脏出现肾小管损伤，服药后3天开始恢复，2周出现TIN。

Because amount of consumption was the largest and information of toxicity was poor, toxicity of tetraethoxysilane [TEOS,Si(OC_2H_5)_4] on ICR male mice was firstly investigated.TEOS intraperitoneal administration study showed that LD_<50> was around 500mg/kg, and the target organ was the kidney characterized by developing acute tubular necrosis (ATN) and tubulointerstitial nephritis (TIN).Acute inhalation study (1000 ppm TEOS for 1, 2, 4 or 8 hours) indicated that LD_<50> (4 hours) was greater than 1000 ppm and that the kidney and nasal mucosa were the target organs. Subacute inhalation studies (200, 100, or 50 ppm TEOS for 6 hours/day, 5 day/week, for 2 or 4 weeks) indicated that no-effect level of TEOS inhalation on the kidney was 50 ppm and that on the nasal cavity was less than 50 ppm. From these results, exposure level should be strictly controlled below 10 ppm, the current recommended exposure limit, and that renal tubular function should be assessed and monitored long-term TEOS-exposed workers.Time course study of TEOS effect on the kidney suggested that the kidney developed renal tubular injury until 12 hours after TEOS i.p., started to recover 3 days after TEOS i.p., and developed TIN by 2 weeks.