Development of Three-Dimensional Microanalysis usig Ion and Electron Dual Focused Beams

我们设计了两种使用离子和电子双聚焦光束的高贵微量分析技术。我们的微观分析的主要目标是单个微粒或IC的微结构。本研究的另一个目标是研究离子-固体相互作用的基本原理。1)三维微观分析在这种方法中，聚焦离子束(FIB)被用作截面工具。另一种聚焦的电子束(EB)用于扫描俄歇显微镜的截面测量。2)FIB-SIMAS中的电子束后电离FIB和FB的结合的另一种产物是一种利用FIB和EB同时轰击溅射中性粒子的新方法。该方法的目的是提高FIB-SIMS分析的灵敏度和定量化。为了实现这两种分析方法，我们研制了一种离子和电子双聚焦束流装置。该装置的主要特点是同时控制FIB和EB。利用该装置，实现了用于三维分析的单颗粒的精确截面。对于后电离方法，利用具有微调束流位置功能的扫描控制器实现了同时轰击的能力。3)FIB诱导俄歇电子能谱和元素映射首次测量了FIB诱导俄歇电子能谱。光谱显示出良好的P/B比，这不仅足以进行光谱测量，还可以进行元素映射。结果，我们利用FIB诱导的Al_&lt；lmm&gt；俄歇峰得到了高分辨率的元素图。这一结果为FIB在微量分析中的应用提供了新的途径。

We devised two noble microanalysis techniques using ion and electron dual focused beams. The main target of our microanalysis is single microparticle or microstrucuture of IC.Another target of this study is concerned with the fundamentals of ion-solid interactions.1) Three-dimensional microanalysisIn this method, a focused ion beam (FIB) is used as a cross-sectioning tool. Another focused beam, an electron beam (EB) is used for scanning Auger microscopy measurements on the cross-sections.2) Electron beam post-ionization in FIB-SIMSAnother product of the combination of the FIB and FB is a new method of the postionization of sputtered neutrals using the simultaneous bombardment of the FIB and EB.The aim of this method is the improvement of sensitivities and quantifications in FIB-SIMS analysis.In order to realize the two analysis methods, we developed an ion and electron dual focused beam apparatus. The main feature of the apparatus is the simultaneous control of the FIB and EB.Using the apparatus, the precise cross-sectioning of single particle for three-dimensional analysis was performed. As for the post-ionization method, the capability of the simultaneous bombardment was realized by using the scan controller with the fine adjustment function of the beam positioning.3)FIB-induced Auger election spectroscopy and elemental mappingWe measured FIB-induced Auger electron spectrum for the first time. The spectrum showed good P/B ratios which were enough not only for spectroscopic measurements but elemental mapping. As a result, we obtained a high resolution elemental map using an FIB-induced Al _<LMM> Auger peak. This result provided a new use of an FIB for microanalysis.