Ecology and Dynamics of Hydrogen at Semiconductor Surface
Ecology and Dynamics of Hydrogen at Semiconductor Surface
批准号:
07305049
负责人:
OURA Kenjiro
金额:
$3.07万
依托单位:
依托单位国家:
日本
项目类别:
Grant-in-Aid for Scientific Research (A)
财政年份:
1995
资助国家:
日本
项目状态:
已结题
起止时间:
1995 至 1996
中文摘要
由于氢是最简单的元素,所以很难探测到氢原子,特别是当它们位于固体表面时。在目前的条件下,利用几种有限的方法,对表面氢的绝对量、电子态、原子排列等性质进行了零碎的独立研究,并对表面氢的行为进行了推论讨论。本研究的目的是通过对表面氢的深入研究,通过对表面氢的深入研究,阐明半导体表面的生态和动力学。在本研究项目中,我们通过结构分析、化学状态评估和理论计算,结合研究人员的密切联系,通过结构分析、化学态评估和理论计算,研究了表面氢对金属原子和衬底硅原子在金属-硅浅界面结构上原子氢吸附行为的影响。特别值得一提的是,我们研究了原子氢暴露引起的In/Si(111)表面的结构变化,发现衬底Si原子是由氢的吸附引起的特殊结构的自组织,并且强烈依赖于衬底重构。
英文摘要
Since hydrogen is the most simple element, it is difficult to detect hydrogen atoms especially when they reside on solid surfaces. Under the present condition, using several limited methods, several properties of surface hydrogen such as absolute amounts, electronic states, atomic arrangements are independently investigated in a fragmentary manner, and the behavior of surface hydrogen is being discussed under inference. The purpose of this research project is to elucidate the ecology and dynamics at semiconductor surfaces by means of intensive studies on surface hydrogen conducted by researchers who have achievements on specialized experimental methods and theorists.In this research project, with getting in close touch between researchers, we have studied the influence of surface hydrogen on the behaviors of metal atoms and substrate silicon atoms at atomic hydrogen adsorption on the metal-silicon shallow interface structures by means of structure analysis, evaluation of chemical state, and theoretical calculation. The result worthy of special mention was that we have investigated the structural changes of the In/Si (111) surface induced by atomic hydrogen exposure and found that the substrate Si atoms ware self-organized to peculiar structures induced by adsorption of hydrogen with being strongly dependent on the substrate reconstruction.
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K.Oura 他3名: "Observation of the diffusion of Ag atoms throgh an a-Si layer on Si(111) by low energy ion scattering" Surf.Sci.363. 156-160 (1996)
K.Oura 和其他 3 人:“通过低能离子散射观察 Ag 原子通过 Si(111) 上的 a-Si 层的扩散”Surf.Sci.363 (1996)。
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K. Oura 他4名: "Thin-film growth-mode anaoysis by low energy ion scattering" Surf. Sci.363. 161-165 (1996)
K. Oura 和其他 4 人:“低能离子散射的薄膜生长模式分析”Surf. 161-165 (1996)。
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T. Takahagi 他4名: "Aluminum-selective chemical vapor deposition induced by hydrogen desorption on silicon" Jpn. J. Appl. Phys.35-2B. 1010-1013 (1996)
T. Takahagi 等 4 人:“硅上氢解吸引起的铝选择性化学气相沉积”J. Appl. 1010-1013 (1996)。
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K. Oura 他3名: "Observation of the diffusion Ag atoms through an a-Si layer on Si (111) by low energy ion scattering" Surf. Sci.363. 156-160 (1996)
K. Oura 和其他 3 人:“通过低能离子散射观察 Ag 原子穿过 Si (111) 上的非晶硅层的扩散”Sci.363 (1996)。
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H. Hongo 他4名: "New desorption state of D_2 from deuterium-terminated Si (100) by potassium adsorption" Surf. Sci.357-358. 698-702 (1996)
H. Hongo 和其他 4 人:“通过钾吸附从氘封端的 Si (100) 中获得 D_2 的新解吸状态”Sci.357-358 (1996)。
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共 14 条
Synthesis of Carbon Nanotubes with Long Length and High Density and its Application to Nanodevices
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批准号:16206004
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$32.2万
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财政年份:2004
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负责人:OURA Kenjiro
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依托单位:
CONTROL OF CARBON NANOTUBE GROWTH USING SELF-ORGANIZED CATALYST NANOCLUSTERS AND ITS APPLICATION TO NANODEVICES
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批准号:14205010
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$35.19万
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财政年份:2002
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负责人:OURA Kenjiro
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依托单位:
Study on Growth Mechanism of Carbon Nanotubes Grown Using Self-Organized Catalyst Nanoclusters
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批准号:13355003
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$33.95万
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财政年份:2001
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负责人:OURA Kenjiro
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依托单位:
Development of Ion Scattering and Recoiling Spectroscopy for In Situ Monitoring of Semiconductor Surface Processes in Gas Phase Atmosphere
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批准号:11305006
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$23.64万
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财政年份:1999
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负责人:OURA Kenjiro
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依托单位:
Microscopic Analysis of Surface Hydrogen and its Application to Nano-Fabrication Techniques
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批准号:10355002
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项目类别:Grant-in-Aid for Scientific Research (A).
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资助金额:$22.72万
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财政年份:1998
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负责人:OURA Kenjiro
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依托单位:
Surface Modification of Hydrogen-Terminated Silicon Substrate using Extra-Low Energy Electron Beam
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批准号:09450017
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项目类别:Grant-in-Aid for Scientific Research (B)
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资助金额:$10.05万
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财政年份:1997
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负责人:OURA Kenjiro
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依托单位:
Joint Study on Hydrogen-Mediated Epitaxy
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批准号:08044146
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项目类别:Grant-in-Aid for international Scientific Research
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资助金额:$8.51万
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财政年份:1996
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负责人:OURA Kenjiro
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依托单位:
Developement of new hydrogen analysis method by combining classical methods and its application to the H/Si systems
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批准号:08555009
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$13.06万
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财政年份:1996
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负责人:OURA Kenjiro
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依托单位:
Physics of Hetero-Epitaxial Growth onto the hydrogen terminated Si surface under the low temperature condition
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批准号:06402025
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项目类别:Grant-in-Aid for Scientific Research (A)
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资助金额:$22.91万
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财政年份:1994
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负责人:OURA Kenjiro
-
依托单位:
海外基金