Study on Micro-Manufactring within Scanning Electron Microscope

经过两年的研究，本研究的主要目标已圆满实现。获得的主要研究成果如下：1。应用椭圆振动的微切削技术的发展利用椭圆振动开发了一种新的微切削技术。在扫描电子显微镜（SEM）下进行了基本切削试验，直接观察了椭圆振动切削的切削过程，并与普通切削和常规振动切削进行了比较。实验证明，该方法具有以下优点：(1)采用本方法可显著降低切屑厚度和切削力。(2)切割能量也大大降低。(3)提高成品表面质量，抑制毛刺的产生。期望现有的切削技术有利于减少因切削力引起的微观组织变形，并通过抑制毛刺的产生来提高其质量。采用一种新的进给驱动方法“行走驱动”，开发了一种安装在SEMA内的微加工机械。首先，基于行走驱动原理，研制了超精密XYrheta工作台原型。通过将XYrheta表与开发的激光反馈控制器相结合，实现了以下误差小于10 nm的超精密定位。开发了另一个原型XYrheta表，它足够小，可以安装在扫描电子显微镜中。验证了该小工作台具有足够高的定位分辨率，可用于微加工。将上述新型微切削技术与行走驱动台相结合，有望在不久的将来实现高刚度的超精密微加工机床。

The main objectives of this research have been successfully attained after two years of research. The majior research results obtained are as follows ;1.Development of micro-cutting technology by applying elliptical vibrationA new micro-cutting technology is developed by applying elliptical vibration. Fundamental cutting tests were carried out within a scanning electron microscope (SEM), and the processes of the new cutting method named "Elliptical Vibration Cutting" were observed directly and compared with those of the ordinary cutting and the conventional vibration cutting. It was confirmed experimentally that the present method has the following advantages.(1) The chip thickness and the cutting force are significantly reduced by the present method.(2) The cutting energy is also rdduced considerably.(3) The quality of finished surfaces is improved, and the generation of burr is suppressed.It is expected that the present cutting technology is advantageous to reduce the deformation micro structure due to cutting force and to improve its quality by suppressing the generation of burr.2.Development of micro-manufacturing machine installed within SEMA new feed drive method named "Walking Drive" is applied to develop a micro-manufacturing machine. First, a prototype ultraprecision XYrheta table is developed based on the principle of the walking drive. Ultraprecision positioning with following errors of less than 10 nm is realized by combining the XYrheta table with an laser feedback controller developed. Another prototype XYrheta table is developed, which is small enough to be installed within a scanning electron microscope. It is confirmed that the small table has cnough high positioning resolution for the micro-manufacturing.It is expected that an ultra-precise micro-manufacturing machine withhigh stiffness will be realized in the near future by combining the above new micro cutting technology and the walking drive table.