Study on a microheater combined with pn junction temperature sensors having fast response and high sensitivity and its applications

主要研究了由501层SOT衬底和pn结温度传感器组成的微气桥上形成的平面加热器的热敏器件，特别是本研究期间发明的气敏器件。1.由单个pn结二极管组成的绝对式温度传感器具有很高的灵敏度，可以通过外加偏置电压调节为类似热敏电阻的灵敏度，能够测量-200~500c2的温度范围。真空传感器的灵敏度比传统的皮拉尼压力计提高了两个数量级以上。采用微气桥(MAB)结构，只有一个微加热器和两个二极管阻尼器。事实证明，我们…MORE可以测量大气压和1x10^3帕之间的压力范围。(与MEMS CORE有限公司合作)。4.研究和论证了高达450℃的绝对湿度传感器的电极材料和布线结构。(与山形奇诺株式会社合作)。5.液体微流量传感器的形成和演示。6.提出了一种利用酶反应的热生物传感器。4.通过初步的实验和模拟，发现利用二极管热敏电阻作为温度传感器和葡萄糖氧化酶是完全可以测量血糖值的。7.发明了电流检测型热电偶作为只测量温差的温度传感器，并对其进行了研究。8.发明了用于加热的二极管热敏电阻的加热二极管温度传感器，并从实验中证实了其高的S/N。其中一些成果已申请专利，而且大部分成果都在社会会议上公布。至于真空传感器，则是在展会上展出的。

Themal devices combined with a planar heater formed on a micro-air-bridge consisting of a 501 layer of the SOT substrate and pn junction temperature sensors, especially the gas sensing device which is invented during this research tenn, are mainly investigated. Following experimental results are obtained.1.Absolute temperature sensor consisting of only single pn junction diode with very high sensitivity which can be adjusted to be the thermistor like sensitivity by applied bias voltage, is demonstrated to be able to measure the temperature range of -200 to 500 C.2.Absolute humidity sensors are fabricated as a trial experiment and its operations are confirmed. Absolute humidity sensing independent on the ambient temperature below 150 C is demonstrated.3.Vacuum sensor with a sensitivity of two order larger or more than that of traditional Pirani gauge is achieved by use of the micro-air-bridge (MAB) structure with a single microheater and two diode-bermistors. It is demonstrated that we … More can measure the pressure range between an atmospheric pressure and 1x10^3 Pa. (collaboration with MEMS Core Co. Ltd.).4.Electrode materials and wiring structure patient up to 450 C for absolute humidity sensor are investigated and demonstrated. (collaboration with Yamagata Chino Co. Ltd.).5.Liquid micro flow sensor is formed and demonstrated. (collaboration with Daiken Iki Co. Ltd.)..6.Thermal bio-sensor using the enzyme reaction is proposed4 and it is found that we can surely measure the value of the blood sugar by use of diode thermistor as a temperature sensor and glucose oxidase due to the primitive experiments and simulation.7.Current detection type thermocouple as a temperature sensor measuring only the temperature difference is invented, and that is formed as the cantilever or MAB structure and is investigated.8.Heating diode temperature sensor of the diode thermistor, which is used by heating, is invented, and high S/N is confirmed from its experiments.Some of these accomplishments are applied as patents, and most results are presented in the society meeting. As to the vacuum sensor it is presented and demonstrated at the exhibition Less