Development of "Traveling Wave" Air Bearing which Exceeds Limitation of Traditional Principles

本研究提出并评价了一种利用行波的高性能流体轴承。首先，利用有限元模型在适当的驱动条件和装置尺寸下计算轴承的理想性能。接下来，提出了一种刚度和精度更高的新装置，该装置由许多薄压电片在支撑方向上直接支撑支承板。此外，开发了产生行波的模块化致动器，以获得稳定的性能。结果表明，在4 μm的浮动位移下，所研制的装置可产生68.8 N的承载力，刚度为27.4 N/ μm。在此基础上，提出了一种以液体为承载介质的新型行波轴承。分析表明，液体轴承具有相当高的性能。

A high-performance fluid bearing which utilizes traveling waves has been proposed and evaluated in this research. First, ideal performance of the bearing is calcula ted by utilizing the finite element model at appropriate driving conditions and device dimensions. Next, a new device with higher rigidity and accuracy is proposed, where many thin piezoelectric plates support the bearing plate directly in the supporting direction. In addition, modular actuators which generate the traveling waves aredeveloped to attain steady performance. As a result, it is verified that the developed device can generate bearing force of 68.8 N and has rigidity of 27.4 N/ μm at floating displacement of 4 μm. Furthermore, a new type of traveling-wave bearing is proposed which utilizes liquid as the bearing medium. It is clarified analytically that the liquid bearing has considerably higher performance .