Acceleration of Stress Migration Using Thermal Control and itsApplication in Mass Fabrication of Micro/Nano Materials

为了实现各种金属微纳米材料的大规模应力迁移制备，通过对不同金属薄膜样品进行一系列的退火实验，系统地研究了热循环和气氛冷却等热控制方法对各种金属微纳米材料的影响。对原子有效扩散和放电的热控条件的研究表明，原子迁移率和驱动力的诱导促进可以增加原子通量发散的绝对值，加速SM，这对各种金属微/纳米材料的大规模制备具有重要的贡献。

To realize the mass fabrication of various metallic micro/nano materials using stress migration (SM), the effect of thermal control including thermal cycle and atmosphere cooling was investigated systematically by carrying out a series of annealing experiments on different metallic thin films samples. The investigation on the suitable condition of thermal control for effective atomic diffusion and discharge indicates that the induced promotion of both atomic mobility and driving force can increase the absolute value of the atomic flux divergence and accelerate SM, which makes a significant contribution to mass fabrication of various metallic micro/nano materials.