Development of Laser Trapping Probe for The Nano-CMM

纳米CMM本文提出了一种用于微小零件坐标测量的三坐标测量机，该测量机与传统的三坐标测量机一样，不使用灵敏度在10 nm以内的微球探头，同时测量力小于10- 5 N，无法实现测量范围在立方厘米左右、精度小于50 nm的纳米三坐标测量机。为此，我们提出了新的探针技术。其原理是基于单光束的小颗粒梯度力光阱和显微干涉仪，即激光捕获探针。主要研究结果如下：（1）通过理论分析，研究了水和空气中的捕获力随周围介质折射率和物镜的数值孔径等光学条件的变化规律。为了计算它们，基于射线光学模型和辐射压力理论， ...更多信息 loyed.明确了激光陷阱探测器位置探测的动力学行为。(2)我们已经证明了捕获的二氧化硅颗粒的直径为5微米的水介质中使用作为一个三维传感探头和测量条纹位移根据探头的方法到工件。建立了用Mirau干涉仪检测位置的原理。我们指出，激光捕获探针是有用的，用于测量一个微米级的三维形状的位置小于50 nm的精度。(3)利用激光捕获探针，研制了一种基于Linnik显微干涉仪的新型激光捕获探针实验系统。基于聚焦激光束辐射压力的单光束梯度力光阱被成功地用于稳定振打空气中的二氧化硅颗粒。在此基础上，研究了用Linnik显微干涉仪检测微球位置的方法测量微球位移的精度。(4)发现了激光陷阱探针在空气中的非接触位置传感原理。利用该原理对NIST可溯源平均粒径为160 μ m的玻璃微球进行了形貌测量。通过测量验证了该方法的有效性。少

The nano-CMM (Coordinate Measuring Machine) is proposed to be used for coordinate metrology of microparts in the same manner of a conventional CMM.Without the probe consisting of a micro-sphere of which sensitivity is in 10 nm and at the same time the measuring force is of less than 10-_5 N, the nano-CMM with the measuring range of about a cubic centimeter and the accuracy of less than 50 nm cannot be realized. Therefore we have proposed the new probe technique. The principle is based on single-beam gradient-force optical traps of a small particle and the microscope interferometer, that is called the laser trapping probe. Main results of this study are summarized as follows,(1) The trapping force in water and air for optical conditions such as refractive index of surrounding 'medium and N.A.of the microscope objectives are investigated by theoretical analysis. To calculate them the simulator for the trapping force based on the ray optics model and radiation pressure force theory is emp … More loyed. Dynamical behavior for detecting the position by the laser trapping probe is made clear.(2) We have demonstrated trapping a silica particle with the diameter of 5mum in aqueous media for using as a three-dimensional sensing probe and measuring fringe shift according to the probe approach to the workpiece. We established the principle of detecting a position by using Mirau interferometer. We indicated that the laser trapping probe is useful for measuring a position of a micron-sized 3-D shape with an accuracy of less than 50nm.(3) The new laser trapping probe experimental system based on Linnik microscope interferometer is developed for atmospheric , use of the laser trapping probe. Single-beam gradient-force optical traps based on the radiation pressure of a focused laser beam is successfully demonstrated for the stable rapping of silica particles in air. And then, measurement accuracy of the shifts of a micro-sphere with detecting the position by Linnik microscope interferometer is investigated.(4) We found non-contact position sensing principle for the laser trapping probe in air. Form of glass microspheres with NIST traceable mean diameter of 160gm is measured based on the principle. Validity of our method is verified by this measurement. Less