Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS)

该项目旨在利用纳米金刚石（NCD）开发高频率、高品质因数的微机电系统（MEMS）。NCD因其极端的杨氏模量而为MEMS提供了上级硅的性能，但它也与硅CMOS技术兼容，与其他潜在的MEMS材料相比具有关键优势。高性能NCD生长和平面化将针对MEMS应用进行优化。在表现出块状金刚石性质的大面积上实现连续、光滑、无针孔的NCD将使得能够以相对于当前可用的块状金刚石技术大幅降低的成本实现多种应用。由此产生的材料将有MEMS领域以外的应用，如在摩擦学，光学涂层，电化学电极（当掺杂硼），散热等NCD的洁净室处理技术的发展将允许制造新的设备，并导致利用这种新材料的新思路。

This project aims to develop high frequency, high quality factor Micro-Electro-Mechanical Systems (MEMS) from Nanocrystalline Diamond (NCD). NCD offers superior performance to silicon for MEMS due to its extreme Young's modulus, but it is also compatible with silicon CMOS technologies, offering a key advantage over other potential MEMS materials. High performance NCD growth and planarization will be optimised for MEMS applications. The realisation of continuous, smooth, pin hole free NCD over large areas exhibiting bulk diamond properties will enable a multitude of applications at drastically reduced cost to currently available bulk diamond technologies. The resulting material will have applications outside the MEMS field such as in tribology, optical coatings, electrochemical electrodes (when doped with boron), heat spreading etc. The development of clean room processing technologies of NCD will allow the fabrication of new devices and result in new ideas exploiting this novel material.