Rapid microfabrication of microsystems for ultrasound imaging and mechanical signal processing

该研究项目侧重于理论层面的创新及其在通过快速微加工（如无掩模灰度光刻、喷墨微印、激光微加工）制造的低成本微结构阵列中的实现的协同结合。它补充了最近授予的主要CFI国家补助金，该补助金有力地增强了UBC快速制造的现有基础设施。在技术方面，目标是为微机电结构的面内和面外阵列开发可靠的快速制造工艺，定义在大面积（与目前的模具尺寸相比）和柔性基板上。重点将主要放在基于聚合物的技术上，而更长远的目标是结合与基于陶瓷的化合物的微加工相关的处理模块，以及与有机电子设备的集成。平面内，耦合可移动微结构的二维阵列将利用大面积属性在力学领域产生等效的信号处理函数（滤波），类似于点阵滤波器或模拟元胞自动机。机电耦合为机械滤波器的特定功能增加了可编程性，在实时频谱分析领域具有目标应用。柔性衬底特性将在第二个目标应用中得到利用，其中聚合物CMUT（电容式微机械超声换能器）元件的二维阵列，在平面外移动，将成为构建用于癌症检测的内窥镜超声成像系统的关键元素。胰腺癌是一种常见且高度致命的疾病，只有早期完全切除才能保证长期生存。内窥镜超声已经被证明在检测胰腺肿瘤方面具有最高的灵敏度，但换能器头部的性能仍有待改进。此外，2D聚合物CMUT阵列实现了低成本的3D超声成像系统，提供了新的有价值的见解。较短的理论-实验周期对hqp很有吸引力，并有望带来快速的进化和更深入的洞察力，对他们未来的职业生涯有明显的影响。

This research program focuses on the synergic combination of innovations at the theoretical level and their implementation in low-cost microstructure arrays fabricated through rapid micromachining (e.g. maskless grayscale lithography, inkjet microprinting, laser micromachining). It complements a recently awarded major CFI national grant that strongly enhances the existing infrastructure for rapid fabrication at UBC. On the technology side, the objective is to develop reliable rapid fabrication processes for in-plane and out-of-plane arrays of microelectromechanical structures, defined on large areas (compared to present die sizes) and on flexible substrates. The focus will be mainly on polymer-based technologies, while a longer objective is to incorporate as well processing modules related to microfabrication of ceramic-based compounds, and integration with organic electronic devices. 2D arrays of in-plane, coupled movable microstructures will exploit the large area attribute for generating equivalent signal processing functions (filtering) in the mechanical domain, analogous to lattice filters or analog cellular automata. The electromechanical coupling adds programmability to the specific features of the mechanical filters, with target applications in the field of real-time spectrum analysis. The flexible substrate feature will be exploited in a second target application, where 2D arrays of polymer CMUT (Capacitive Micromachined Ultrasonic Transducer) elements, moving out-of-plane, will be the key element for building an endoscopic ultrasound imaging system for cancer detection. Pancreatic cancer is common and highly lethal, with the only chance of long-term survival depending on an early complete resection. Endoscopic ultrasound has already proven to have the highest sensitivity in detecting pancreatic tumors, but the performance of the transducer head can still be improved. Moreover, the 2D polymer CMUT array enables low-cost 3D ultrasound imaging systems, giving new valuable insights. The short theory - experiment cycle is attractive for HQPs, and promises to bring a fast pace of evolution and a deeper insight, with noticeable effects on their future career.