Fabrication, packaging and reliability of nano-electro-mechanical systems (NEMS) devices

近年来，先进的技术允许制造纳米机电系统（NEMS）设备原型，例如用于速度电子设备中的信号处理和传输的纳米探针。然而，制造具有低接触电阻的高精度NEMS器件是NEMS器件工程中的一个严峻挑战。此外，在其测试和封装方面存在重大挑战，包括将NEMS芯片集成到当前的微机电系统（MEMS）中。 该项目旨在证明纳米键合混合互连（例如使用具有低接触电阻的石墨烯）与当前NEMS和MEMS器件中使用的铜、金和银微引线键合互连具有竞争力。 这项研究的主要成果是NEMS设备测试和封装的技术开发，使用混合材料，如基于石墨烯的互连，用于健康和通信领域的超快电子和低互连电阻应用。 低功耗、高带宽设备的快速小型化有可能彻底改变健康技术、无线通信和智能传感器系统。这些纳米和微机电系统（N/MEMS）可用于广泛的应用，从检测和治疗病原体和肿瘤，到实现嵌入式移动的互联网服务。颠覆性创新的潜力很大，但加拿大的卫生和通信部门面临着巨大的N/MEMS培训缺口。N/MEMS创新网络旨在建立一个NSERC计划，专注于培训加拿大中小型企业（SME）和大型企业（LE）的N/MEMS职业学生。 拟议的项目有三个关键优先事项：i）与国家和国际合作者以及健康和通信技术领域的指定合作伙伴一起开发尖端的N/MEMS制造，包装，测试和可靠性系统，流程和程序，所有这些都可以获得最先进的基础设施; ㈡通过培训未来的科学家、技术人员、工程师、设计师、管理人员和企业家，向加拿大工业提供这些使能技术; iii）为学员提供业界所重视及需要的专业技能，包括项目管理，沟通技巧，知识产权发展及保护知识。

In recent years advanced technology allows manufacturing of nano-electro-mechanical systems (NEMS) device prototypes such as nano-probes used in signal processing and transmission in speed electronics. However, manufacturing of high precision NEMS devices with low contact resistance is a serious challenge in NEMS device engineering. Moreover, there are substantial challenges in their testing and packaging including integrating the NEMS chips into current micro-electro-mechanical-systems (MEMS). The proposed project aims to demonstrate that nano-bonded hybrid interconnections for instance using graphene with low contact resistance are competitive to copper, gold and silver micro-wire-bonded interconnections used in current NEMS and MEMS devices. The main output of this research is proposed to be a technology development for the NEMS device testing and packaging using hybrid such as graphene based interconnections for ultra-fast electronics and low interconnection resistance applications in health and communications. The rapid miniaturization of low-power, high-bandwidth devices has the potential to revolutionize health technologies, wireless communication and smart sensor systems. These nano and micro-electro-mechanical-systems (N/MEMS) can be used in a vast range of applications, from detecting and treating pathogens and tumors, to enabling embedded mobile internet services. The potential for disruptive innovation is great, but Canada’s health and communication sectors face a significant N/MEMS training gap. The N/MEMS-innovation network seeks to found an NSERC program focused on training students for N/MEMS careers in Canadian small and medium sized enterprises (SMEs) and large enterprises (LE). The proposed project has three key priorities: i) to develop cutting edge N/MEMS manufacturing, packaging, testing and reliability systems, processes and procedures with national and international collaborators as well as identified partners in health and communication technologies, all with access to the most advanced infrastructure; ii) to deliver these enabling technologies to Canada’s industry by training a future workforce of scientists, technicians, engineers, designers, managers and entrepreneurs; iii) to provide trainees with professional skills that are valued and required by industry, including project management, communication skills, and knowledge of intellectual property development and protection.