Vibrational and motional characterisation test benches for microelectromechanical systems

这项提议的目标是获得一个平面外振动计和一个旋转运动模拟器，用于表征微电子机械系统(MEMS)。这将显著增强我们光学测量MEMS运动并将其暴露在受控运动中的能力，从而支持独特的研究计划。我们目前还没有办法以这种方式表征MEMS，因为我们只使用电气测试来实现这一目的。这种测试是非直接测量，容易产生寄生和馈通，导致信号拾取质量下降。为了避免这一问题，所要求的设备将允许对运动进行直接皮秒尺度的测量，并使用精确和大范围的机械刺激。因此，它将为我们的研究小组打开一系列最先进的MEMS设备的表征之门，例如微机械超声换能器、谐振传感器、光学微系统、能量采集器和电容式换能器。值得注意的是，我们正在进行这里描述的几项研究合作，这些合作将显著受益于所请求的设备启用的测试台。 这些设备将安装在ETS，主要由ETS和魁北克大学的研究人员使用。ETS迫切需要它，因为我们无法在本地访问为MEMS特性专门配置的所需设备。振动计将与我们用于MEMS驱动的探针站集成在一起，旋转运动模拟器将与定制的真空室集成在一起。值得注意的是，这种设备很少配置为与MEMS一起使用，因为它通常用于更大规模的设备的表征。根据配置，该设备将使我们能够直接测量MEMS在1微米范围内的运动，并在高加速度和真空下对其进行机械激励。这将产生更多通用和增强的表征方法，这是我们目前无法获得的。因此，该设备将增强我们在最先进的测试台上表征MEMS的能力，并将极大地补充我们的表征基础设施。 这些设备将直接支持专注于创新微系统特征的研究活动，因此，它的获得对我们目前的研究活动和本文所述的计划活动的成功至关重要。值得注意的是，它将通过为各种MEMS设备提供最先进的测试台，显著增加共同申请者在加拿大和国外的研究影响。 该设备将是包括MEMS在内的MEMS领域HQP培训的关键要素，如超声波、传感、致动器、光学和能量采集。预计每年至少有35名HQP将接受培训，以使用这些设备来表征MEMS。

The goal of this proposal is to acquire an out-of-plane vibrometer and a rotary motion simulator for the characterisation of microelectromechanical systems (MEMS). This will significantly enhance our ability to optically measure the motion of MEMS and expose them to controlled motion, thus supporting unique research programs. We currently have no means of characterizing MEMS in this fashion, as we exclusively use electrical tests for this purpose. Such tests represent non-direct measurements and are prone to parasitics and feedthrough, causing deteriorated signal pickup. To circumvent this problem, the requested equipment will allow for direct picometer-scale measurement of motion and for the application of precise and wide-ranging mechanical stimuli. Accordingly, it will open the door to the state-of-the-art characterisation of a wide range of MEMS devices of interest to our research groups such as micro-machined ultrasonic transducers, resonant sensors, optical microsystems, energy harvesters and capacitive transducers. Notably, we are carrying out several research collaborations, described herein, that will significantly benefit from the test bench enabled by the requested equipment. The equipment will be installed at ETS and primarily used by researchers of ETS and of the Université du Québec À Montréal. It is urgently needed at ETS since we do not have access locally to the requested equipment specifically configured for MEMS characterisation. The vibrometer will be integrated with our probe station for MEMS actuation, and the rotary motion simulator will be integrated with a custom vacuum chamber. Notably, such equipment is seldom configured for use with MEMS, as it is often meant for the characterisation of larger-scale devices. As configured, this equipment will enable us to directly measure the motion of MEMS in an area of 1 micrometer and to stimulate them mechanically under high acceleration and under vacuum. This will yield more versatile and enhanced characterisation methods that are currently unavailable to us. The equipment will thus enhance our ability to characterize MEMS in state-of-the-art test benches and will significantly complement our characterisation infrastructure. The equipment will directly support research activities focusing on the characterisation of innovative microsystems, and its acquisition is thus critical to the success of our current research activities and of the planned activities described herein. Notably, it will significantly increase the impact of the co-applicants’ research in Canada and abroad by providing a state-of-the-art test benches for a wide-range of MEMS devices. The equipment will be a critical element for the training of HQP in fields including MEMS such as ultrasonics, sensing, actuators, optics and energy harvesting. An expected yearly minimum of 35 HQPs will be trained to use the equipment to characterise MEMS.