Microelectromechanical Low-power Strain Sensor for Structural Health Monitoring Applications

适用于飞机结构健康监测（SHM）的应变传感器通常没有封装或需要大量的功率，导致难以进入受限位置、难以承受的繁重布线以及频繁且昂贵的电池维护。微机电系统（MEMS）可以减小这些传感器的尺寸和功耗。然而，相关的传感电子器件需要大量的功率来调节来自MEMS传感器的模拟信号。提出了一种数字输出MEMS传感器的设计，沿着监测低功耗电子设备，这是专为SHM的飞机在一个紧凑的形状因子和低功耗的信号方案。IPR的MEMS传感器是基于一个直接接触的结构，允许开/关类型的检测的应变变化，移动梭质量。这种独特而有效的解决方案将使IPR能够创建一个经济实惠且节能的应变传感SHM系统。然而，当前的解决方案已经解决了微制造成品率问题，并且关于其基于接触的感测方案仍然存在问题。这需要重新审视当前的应变传感器设计，并在稳定和强大的商业MEMS制造工艺中实现。IPR希望通过这个Engage Plus项目继续与ETS的Frederic Nabki教授合作，以改进先前Engage项目中提出的MEMS应变传感器设计，并制造初始原型。该传感器以后将集成在IPR的定制低功耗接口电子设备中，以实现SHM的完整应变传感系统。该项目是IPR低功耗和紧凑型应变传感器的关键组成部分，将成为迈向领先市场地位的跳板。该项目产生的创新MEMS器件将最终实现适用于各种传统环境的新型传感器网络。该项目将为HQP（一名研究专业人员，一名硕士生和一名研究生）提供培训。

Strain sensors suited for the structural health monitoring (SHM) of airplanes are often not miniaturised orrequire significant amounts of power, leading to difficulties in accessing constrained locations, prohibitivelyheavy cabling, and frequent and expensive battery maintenance. Microelectromechanical systems (MEMS) canreduce the size and power consumption of these sensors. However, the associated sensing electronics requiresignificant amounts of power to condition the analog signals from the MEMS transducer.To resolve this, IPR inc. is proposing a digital-output MEMS transducer design, along with the monitoringlow-power electronics, that is tailored for SHM of airplanes in a compact form-factor and low-power signalingscheme. IPR's MEMS transducer is based on a direct contact structure that allows for on/off type of detectionof a strain variation that moves a shuttle mass. This unique and effective solution will allow IPR to create anaffordable and power efficient strain sensing SHM system. However, the current solution has metmicro-fabrication yield issues and questions remain regarding its contact-based sensing scheme. This requiresthe current strain transducer design to be revisited and its implementation in a stable and robust commercialMEMS fabrication process. IPR wants to continue its collaboration with Prof. Frederic Nabki at ETS throughthis Engage Plus project to refine the MEMS strain sensor design proposed in the previous Engage project andcharacterise the initial prototypes fabricated. This transducer will later be integrated within IPR's customlow-power interface electronics to implement a complete strain sensing system for SHM.This project is a key building block of IPR's low-power and compact strain sensor, and will be a springboardtowards a leadership market position. The innovative MEMS device resulting from this project will ultimatelyenable the implementation of novel network of sensors well-suited to various traditionally inaccessibleenvironments. This project will provide training for HQP (one research professional, one master's student an