Compact and Energy Efficient Wireless Microelectromechanical Sensing Systems

与集成电路（ic）一样，微机电系统（MEMS）是一种颠覆性技术，可以增强系统并实现新的应用。MEMS市场正在以越来越快的速度扩张，预计将从2014年的110亿美元增长到2020年的210亿美元，几乎翻倍[Yole， 2015]。最近，MEMS传感器的存在越来越多，特别是在可穿戴设备（例如智能手表，健身追踪器）和传感器节点（例如跟踪，天气预报）中，其中许多传感器组合在一起。这保证了更紧密的集成，以实现更紧凑的系统，并需要无线接口来传输传感器遥测数据，并允许更多的移动性。这种传感器适用于即将到来的物联网，在物联网中，大量小型和自主的传感器节点，独立于电源和布线基础设施，预计将大大减少部署开销。

Like integrated circuits (ICs), microelectromechanical systems (MEMS) are a disruptive technology, enhancing systems and enabling new applications. The MEMS market is expanding at an increasing rate, projected to almost double from $11B in 2014 to $21B in 2020 [Yole, 2015]. Recently, MEMS sensors have had an increased presence, notably in wearables (e.g. smartwatches, fitness trackers) and sensor nodes (e.g. tracking, weather forecasting), where many sensors are combined. This warrants tighter integration to allow for more compact systems, and requires wireless interfaces to transmit sensor telemetry and allow for more mobility. Such sensors are suited to the upcoming Internet-of-Things, where large numbers of small and autonomous sensor nodes, independent of power and wiring infrastructure, are expected to be deployed with a much reduced deployment overhead.