A versatile multi-project cleanroom fabrication process for superconducting quantum circuits

量子信息技术目前正从学术界向工业界过渡，最先进设备的纳米制造过程的复杂性正在迅速增长。如今，它的研发能力已经超过了初创公司或学术研究团体的能力。因此，为了确保量子信息技术的持续进步，有必要将小公司和研究小组的制造努力集中起来，而不是将这一战略技术的使用限制在少数大型跨国公司。该项目的目标是在加拿大建立一条共享纳米制造最先进超导电路的试验线。该项目基于舍布鲁克大学量子研究所（IQ）超导量子电路专家与已经实现了向共享制造过渡的德克萨斯大学3IT的微纳米制造专家之间的密切合作。工业合作伙伴CMC Microsystems是加拿大学术界和工业界过程和工具共同化方面的专家，将确保该项目符合市场需求。设备制造商Angstrom Engineering和Raith将为该项目贡献他们在薄膜沉积和电子束光刻方面的专业知识，这将反过来帮助他们优化量子系统的工具。这个项目的成果将被工业合作伙伴Nord Quantique直接使用，Nord Quantique是一家位于舍布鲁克的初创公司，生产超导量子电路。

Quantum information technology is currently transiting from academia to industry and the complexity of nanofabrication processes for state-of-the-art devices is growing rapidly. It is now exceeding the research and development capacity of start-up companies or academic research groups. In order to ensure continuous progress of quantum information technology, it is, therefore, necessary to pool the manufacturing efforts of small companies and research groups so as not to restrict the use of this strategic technology to a few large multinational companies. The goal of this project is to set up a pilot line for shared nanofabrication of state-of-the-art superconducting circuits in Canada. The project is based on a close collaboration between experts in superconducting quantum circuits at Institut Quantique (IQ) of Université de Sherbrooke (UdeS) and experts in micro- and nanofabrication at 3IT of UdeS where the transition to shared manufacturing has already taken place. The industrial partner CMC Microsystems, an expert in the mutualization of processes and tools for the Canadian academic and industrial world, will ensure that the project corresponds to the needs of the market. Equipment manufacturers Angstrom Engineering and Raith will contribute their expertise in thin film deposition and e-beam lithography to the project which will in turn help them to optimize their tools for quantum systems. The results of this project will be used directly by the industrial partner Nord Quantique, a start-up company in Sherbrooke that manufactures superconducting quantum circuits.