Surface Dynamics on a Subangstrom and Subsecond Scale from Scattering and Recoiling Imaging Spectrometry (SARIS)

这个研究项目的重点是开发一种用于固体表面结构分析的新方法，得到了分析和表面化学项目的支持。散射和反冲成像光谱法（SARIS）将发展成为一种在与一些重要动态过程一致的时间尺度上提供固体表面结构信息的方法。该方法基于Rabalais实验室先前开发的阴影锥技术，研究项目的主要目标是设计和构建可用于SARIS研究的仪器。该技术将应用于许多重要的薄膜生长和表面反应过程，对电子材料化学的理解产生影响。在与电子器件生长和加工相兼容的时间尺度上获得表面结构信息的能力是半导体工业的一项关键能力。这一研究项目的成果将有助于开发能够满足这一需求的分析仪器和方法。＊＊＊

9321899 Rabalais This research project, which is focussed on the development of a new method for the structural analysis of solid surfaces, is supported by the Analytical and Surface Chemistry Program. Scattering and Recoiling Imaging Spectrometry (SARIS) will be developed as a method for providing structural information about solid surfaces on a time scale consistent with some important dynamic processes. This method is based on the shadow cone techniques previously developed in the Rabalais laboratory, and the primary goal of the research project is the design and construction of an instrument which can be used for SARIS studies. The technique will then be applied to a number of important thin film growth and surface reaction processes, with impact on the understanding of electronic materials chemistry. %%% The ability to obtain surface structural information on a time scale compatible with electronic device growth and processing is a crucial ability for the semiconductor industry. The results of this research project will enable the development of analytical instrumenation and methodology which will address this need. ***