Surface Dynamics on a Subangstrom and Subsecond Scale from Scattering and Recoiling Imaging Spectrometry (SARIS)

9321899 Rabalais该研究项目的重点是开发固体表面结构分析的新方法，得到了分析和表面化学计划的支持。 散射和散射成像光谱（SARIS）将被开发为一种方法，用于提供与一些重要的动态过程相一致的时间尺度上的固体表面的结构信息。 这种方法是基于阴影锥技术以前在拉巴莱实验室开发的，和研究项目的主要目标是设计和建造的仪器，可用于SARIS研究。 然后，该技术将被应用于一些重要的薄膜生长和表面反应过程，对电子材料化学的理解产生影响。 在与电子器件生长和加工兼容的时间尺度上获得表面结构信息的能力是半导体工业的关键能力。 该研究项目的结果将使分析仪器和方法的发展，将满足这一需求。 ***

9321899 Rabalais This research project, which is focussed on the development of a new method for the structural analysis of solid surfaces, is supported by the Analytical and Surface Chemistry Program. Scattering and Recoiling Imaging Spectrometry (SARIS) will be developed as a method for providing structural information about solid surfaces on a time scale consistent with some important dynamic processes. This method is based on the shadow cone techniques previously developed in the Rabalais laboratory, and the primary goal of the research project is the design and construction of an instrument which can be used for SARIS studies. The technique will then be applied to a number of important thin film growth and surface reaction processes, with impact on the understanding of electronic materials chemistry. %%% The ability to obtain surface structural information on a time scale compatible with electronic device growth and processing is a crucial ability for the semiconductor industry. The results of this research project will enable the development of analytical instrumenation and methodology which will address this need. ***