Structure of Low Energy Ion Beam Deposits: Energy and Temperature Effects

这项研究的目的是研究热能高达几百eV的原子/离子在表面引起的原子结构、缺陷、空位和化学反应，作为离子动能和衬底温度的函数。热原子束是由注入池产生的，而离子束是由一种新的脉冲、质量选择、低能量的离子束系统产生的。用飞行时间散射和反冲光谱和低能电子衍射进行了原位结构分析。利用原位X射线、紫外光电子能谱和俄歇能谱(PS、UPS和AES)以及常规的非原位结构分析方法，如X射线衍射、卢瑟福背散射和透射电子显微镜等，对材料进行了表征。离子轨迹模拟和分子动力学计算的研究加强了薄膜生长中的结构确定和原子尺度过程。这些研究很重要，因为它们增进了对低能离子-表面相互作用所涉及的基本物理和化学过程的理解。此外，由于离子能量和衬底温度的合理控制，所提出的合成路线有可能生长出独特的、以前未知的材料。

The goal of this research is to investigate atomic structures, defects, vacancies, and chemical reactions on surfaces induced by atoms/ionss with thermal energies up to several hundred eV as a function of ion kinetic energy and substrate temperature. Thermal atomic beams are produced by effusion cells while ion beams are generated by a new pulsed, mass-selected, low-energy ion beam system. In situ structural analysis are conducted by Time-Of- Flight Scattering and Recoiling Spectrometry and Low Energy Electron Diffraction. In situ X-ray and UV photoelectron and Auger spectroscopy (PS, UPS and AES) and conventional ex situ structural analysis methods such as x-ray diffraction, Rutherford backscattering, and transmission electron microscopy also are used for material characterization. Studies on ion trajectory simulations and molecular dynamics calculations augment structural determinations and atomic scale processes in film growth. These studies are important because they enhance understanding of the fundamental physical and chemical processes involved in low-energy ion-surface interactions. Also, the proposed synthetic routes have potentials for growing unique, previously unknown materials because of the judicious manipulation of the ion energy and substrate temperature.