Structure of Low Energy Ion Beam Deposits: Energy and Temperature Effects

低能离子束沉积的结构：能量和温度效应

• 批准号: 9224377
• 负责人: John Rabalais
• 金额: $ 32.68万
• 依托单位: University of Houston
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1993
• 资助国家: 美国
• 起止时间: 1993-05-15 至 1996-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9224377&HistoricalAwards=false
• 关键词: Structure; Low; Energy; Ion; Beam

The goal of this research is to investigate atomic structures, defects, vacancies, and chemical reactions on surfaces induced by atoms/ionss with thermal energies up to several hundred eV as a function of ion kinetic energy and substrate temperature. Thermal atomic beams are produced by effusion cells while ion beams are generated by a new pulsed, mass-selected, low-energy ion beam system. In situ structural analysis are conducted by Time-Of- Flight Scattering and Recoiling Spectrometry and Low Energy Electron Diffraction. In situ X-ray and UV photoelectron and Auger spectroscopy (PS, UPS and AES) and conventional ex situ structural analysis methods such as x-ray diffraction, Rutherford backscattering, and transmission electron microscopy also are used for material characterization. Studies on ion trajectory simulations and molecular dynamics calculations augment structural determinations and atomic scale processes in film growth. These studies are important because they enhance understanding of the fundamental physical and chemical processes involved in low-energy ion-surface interactions. Also, the proposed synthetic routes have potentials for growing unique, previously unknown materials because of the judicious manipulation of the ion energy and substrate temperature.

这项研究的目标是研究原子结构， 缺陷、空位和化学反应 原子/离子的热能高达几百eV， 离子动能和衬底温度的函数。 热 原子束由泻流单元产生，而离子束 由一种新的脉冲式、质量选择式、低能离子束产生 系统 现场结构分析是由时间的， 飞行散射和散射光谱与低能 电子衍射 原位X射线和紫外光电子与俄歇 光谱（PS，UPS和AES）和常规的非原位结构 分析方法，如X射线衍射，卢瑟福 背散射和透射电子显微镜也被使用 用于材料表征。 离子轨道研究 模拟和分子动力学计算增强了结构 测定和薄膜生长中的原子尺度过程。 这些 这些研究很重要，因为它们增强了对 低能量的基本物理和化学过程 离子-表面相互作用 此外，所提出的合成路线具有 有可能生长出独特的、以前未知的材料， 明智地操纵离子能量和基质 温度