Engineering Research Equipment: Scanning Tunneling Microscope for Studying Semiconductor Surface Reactions

工程研究设备：用于研究半导体表面反应的扫描隧道显微镜

• 批准号: 9500387
• 负责人: Robert Hicks
• 金额: $ 8.29万
• 依托单位: University of California-Los Angeles
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-03-15 至 1997-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9500387&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Scanning; Tunneling

CTS-9500387 Robert Hicks A scanning tunnelling microscope (STM) is added to a system consisting of a reactor for vapor-phase expitaxy and a chamber for surface analysis. These are interfaced with an ultrahigh-vacuum server that allows transfer of samples among the three stations without exposure to air. The STM is to be used to study the surface structure of II-VI films, the atomic ordering of III-V alloys, the heteroepitaxy of compound semiconductors on silicon, and the molecular kinetics of III-V and II-VI organmetallic vapor-phase epitaxy (OMVPE).

CTS-9500387 Robert Hicks 将扫描隧道显微镜（STM）添加到由气相外延反应器和表面分析室组成的系统中。 它们与一个超高真空服务器连接，使样品在三个站之间转移而不暴露于空气。 STM将用于研究II-VI族薄膜的表面结构、III-V族合金的原子有序性、化合物半导体在硅上的异质外延以及III-V族和II-VI族有机金属气相外延（OMVPE）的分子动力学。