CAREER: Surface Chemistry in Materials Processing

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9501774 Bent This career development project describes research and education thrusts to be implemented over the next five years. It includes the development of a research program that addresses a molecular-level understanding of surface chemical processes that describe microelectronics materials fabrication processes such as chemical vapor deposition, chemical etching, and lithography. The education thrusts include focusing on the concepts of "connected curriculum" and "active learning." The goal is to develop instructional methods and a novel curriculum that allows for students to actively learn material which they see as an integral part of the world around them. %%% This award provides NSF support for a junior faculty member to develop a full, balanced academic career in areas of science and education of high priority. ***