Fundamentals of Phase Patterning Polymer Films

相位图案化聚合物薄膜的基础知识

• 批准号: 9803738
• 负责人: Edward Kramer
• 金额: $ 42.9万
• 依托单位: University of California-Santa Barbara
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-04-01 至 2003-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9803738&HistoricalAwards=false
• 关键词: Fundamentals; Phase; Patterning; Polymer; Films

9803738 Kramer An experimental program is proposed to elucidate the processing fundamentals needed to produce films with three dimensionally patterned phase morphologies on micrometer to sub-micrometer length scales. The transfer of patterns from the confining interfaces into films of both phase separating polymer mixtures and ordering block copolymers will be realized by controlling the interaction between the polymer components and the surfaces of these patterns. The interfacial patterns will be produced principally using self assembled monolayers (SAMs) of alkane thiols on Au using a microcontact printing technique. Control of interfacial interaction will be exerted by using HO-terminated alkane thiols, HOOC-terminated alkane thiols, methyl-terminated alkane thiols and their mixtures to produce SAMs with controlled surface energy. These experiments will exploit the complementary depth profiling capabilities of dynamic secondary ion mass spectrometry (SIMS) and forward recoil spectrometry to provide depth information, transmission electron microscopy, low voltage scanning electron microscopy and scanning force microscopy to provide imaging of lateral and cross-sectional film phase structures and scanning Raman microscopy to provide lateral composition profiling. Emphasis will be placed on understanding the kinetics of ordering and island (hole) formation of block copolymer films through diffusional and flow processes as well as the effects of topological confinement of such films by solid interfaces that exert surface fields of various strengths on the two blocks. Similarly a major goal will be to understand how to control surface directed spinodal decomposition process in films of phase separating polymer mixtures to produce two phase structures with patterned morphologies so that the pattern extends in both the lateral and thickness directions. Here again topological confinement of these films by solid surfaces raises important questions that will be focused on. %%% These experiments have the potential to impact a range of new processing technologies, such as new lithographic techniques, new ways to produce selective membranes and new ways to form thin- film optical elements. ***

9803738克雷默提出了一个实验计划，以阐明在微米到亚微米长度尺度上生产具有三维图案化相形貌的薄膜所需的工艺基础。通过控制聚合物组分和图案表面之间的相互作用，可以实现将图案从限制界面转移到相分离聚合物混合物和有序嵌段共聚物的薄膜中。界面图案将主要使用烷基硫醇在Au上的自组装单分子层(SAM)使用微接触打印技术来产生。界面相互作用的控制将通过使用HO-端烷基硫醇、HOOC-端烷基硫醇、甲基-端烷基硫醇及其混合物来实现，以制备表面能可控的自组装膜。这些实验将利用动态二次离子质谱仪(SIMS)和前向反冲光谱的互补深度剖析能力来提供深度信息，利用透射电子显微镜、低电压扫描电子显微镜和扫描力显微镜来提供横向和横截面薄膜相结构的成像，并利用扫描拉曼显微镜来提供横向成分剖析。重点是了解嵌段共聚物薄膜通过扩散和流动过程的有序化和岛(孔)形成的动力学，以及施加不同强度的表面场的固体界面对这类薄膜的拓扑限制的影响。同样，一个主要的目标将是了解如何控制相分离聚合物混合物薄膜中的表面定向调幅分解过程，以产生具有图案化形态的两种相结构，从而使图案化图案在横向和厚度方向上延伸。在这里，固体表面对这些薄膜的拓扑约束再次提出了将重点关注的重要问题。这些实验有可能影响一系列新的加工技术，如新的光刻技术、生产选择性薄膜的新方法和形成薄膜光学元件的新方法。***