POWRE: Resonantly Enhanced Multiphoton Ionization for Measurement of Radical-Surface Reactivities
POWRE: Resonantly Enhanced Multiphoton Ionization for Measurement of Radical-Surface Reactivities
批准号:
9805815
负责人:
Ellen Fisher
金额:
$7.5万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1998
资助国家:
美国
项目状态:
已结题
起止时间:
1998-08-01 至 1999-07-31
中文摘要
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英文摘要
This award of the Professional Opportunities for Women in Research and Education (POWRE) program funded through the MPS Office of Multidisciplinary Activities (OMA) supports the research and educational activities of Professor Ellen Fisher of Colorado State University. The research aims to extend the capabilities of the PI's laboratory for examining plasma radical species by resonant multiphoton ionization detection (REMPI), and to provide postdoctoral student support. The incorporation of a high-frequency Nd:YAG laser into the PI's existing equipment would propel her research program into an entirely new and exploratory direction in studying fundamental aspects of plasma chemistry.The opportunity afforded through the POWRE program will enhance Professor Fisher's research potential as well as her educational mentoring of undergraduate, graduate, and postdoctoral scientists. The results of this research will provide accurate data for those who model plasma systems. This work could also have a large economic impact on the microelectronics industry and thin-film technology by providing improvements in plasma processing methods which reduce manufacturing costs.
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批准号:1803067
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项目类别:Standard Grant
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资助金额:$35.0万
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资助金额:$50.0万
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依托单位:
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批准号:0911248
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项目类别:Continuing Grant
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资助金额:$40.54万
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依托单位:
REU Site: Materials Chemistry Research: Synthesis, Characterization, and Device Fabrication
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批准号:0649263
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资助金额:$34.5万
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财政年份:2007
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负责人:Ellen Fisher
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依托单位:
Toward Fundamental Understanding: Correlating the Gas-Phase, Surface, and Gas-Surface Interface in Halogenated Plasma Systems
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批准号:0613653
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项目类别:Continuing Grant
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资助金额:$45.0万
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财政年份:2006
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负责人:Ellen Fisher
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依托单位:
Mechanistic Studies of Plasma Deposition and Etching for Integrated Circuit Materials
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批准号:0137664
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项目类别:Continuing Grant
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资助金额:$40.0万
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财政年份:2002
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负责人:Ellen Fisher
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依托单位:
Acquisition of an Integrated Scanning Electron Microscope System
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批准号:0114093
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项目类别:Standard Grant
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资助金额:$30.0万
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财政年份:2001
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负责人:Ellen Fisher
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依托单位:
Acquisition of XPS Instrumentation for a Departmental Materials Characterization Facility
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批准号:9977398
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项目类别:Standard Grant
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资助金额:$38.0万
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财政年份:1999
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依托单位:
Investigation of Plasma Deposition and Etching Mechanisms for Silicon-based Materials
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批准号:9812332
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项目类别:Continuing Grant
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资助金额:$32.6万
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财政年份:1998
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负责人:Ellen Fisher
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依托单位:
Investigation of Plasma Deposition Mechanisms for Silicon Dioxide and Silicon Nitride Films
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批准号:9501157
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项目类别:Continuing Grant
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资助金额:$24.8万
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财政年份:1995
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负责人:Ellen Fisher
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依托单位:
Surface Reactivity of Radicals During Plasma Deposition of Thin Films
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批准号:9409272
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项目类别:Standard Grant
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资助金额:$1.8万
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财政年份:1994
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负责人:Ellen Fisher
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依托单位:
海外基金