Acquisition of an Integrated Scanning Electron Microscope System
Acquisition of an Integrated Scanning Electron Microscope System
批准号:
0114093
负责人:
Ellen Fisher
金额:
$30.0万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
2001
资助国家:
美国
项目状态:
已结题
起止时间:
2001-09-01 至 2003-08-31
中文摘要
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英文摘要
This award from the Instrumentation for Materials Research program and the Major Research Instrumentation program to Colorado state University will fund the purchase of an integrated field emission scanning electron microscope (FE-SEM) system for the central Electron Microscopy Center at Colorado State University. The equipment requested will allow imaging specimens at high resolution, providing resolution of structures as small as 1.5 nanometers. An energy dispersive spectroscopy (EDS) system will allow chemical identification, with the capability of precisely mapping multiple elements over a wide area. A third component of the instrumentation will enable investigators to produce nanoscale devices using electron beam lithography. This technique, in conjunction with the high resolution FE-SEM will allow generation of structures as small as 10 nm for applications in optoelectronic materials, superconductors, and sensors. The instrumentation will support the research efforts of seven primary investigators from five departments across campus. In addition, it will be useed by research groups in 8 other departments at CSU as well as several other investigators (both academic and industrial) from along the Colorado Front Range. Finally, the FE-SEM will be used to support and extend the teaching mission of the EM center and the University through hands-on instruction and telepresence microscopy.This award from the Instrumentation for Material Research program and the Major Research Instrumentation program to Colorado State University will fund the purchase of an integrated system of imaging and analytical tools that will greatly expand the capabilities of the Electron Microscopy (EM) Center at Colorado State University. The state-of-the-art scanning electron microscope (SEM) will allow imaging of both biological and materials specimens at the highest magnifications currently possible. In addition, an x-ray analyzer attached to the microscope will provide identification of most elements in the periodic table and will map their locations with high precision on specimen surfaces. The electron beam lithography system, coupled with the SEM will allow production of micro- and nanoscopic structures that will be used in a variety of optical and electrical devices, such as light emitting diodes, semiconductor lasers, and highly efficient sensors and detectors. The educational mission of science and engineering departments across the CSU campus will also be enhanced by the acquisition of this instrumentation through hands-on instruction and remote access via telepresence microscopy.
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批准号:1803067
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项目类别:Standard Grant
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资助金额:$35.0万
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财政年份:2018
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负责人:Ellen Fisher
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批准号:0911248
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财政年份:2009
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REU Site: Materials Chemistry Research: Synthesis, Characterization, and Device Fabrication
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财政年份:2007
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依托单位:
Toward Fundamental Understanding: Correlating the Gas-Phase, Surface, and Gas-Surface Interface in Halogenated Plasma Systems
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批准号:0613653
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项目类别:Continuing Grant
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资助金额:$45.0万
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财政年份:2006
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负责人:Ellen Fisher
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依托单位:
Mechanistic Studies of Plasma Deposition and Etching for Integrated Circuit Materials
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批准号:0137664
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项目类别:Continuing Grant
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资助金额:$40.0万
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财政年份:2002
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负责人:Ellen Fisher
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依托单位:
Acquisition of XPS Instrumentation for a Departmental Materials Characterization Facility
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批准号:9977398
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项目类别:Standard Grant
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资助金额:$38.0万
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财政年份:1999
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负责人:Ellen Fisher
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依托单位:
POWRE: Resonantly Enhanced Multiphoton Ionization for Measurement of Radical-Surface Reactivities
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批准号:9805815
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项目类别:Standard Grant
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资助金额:$7.5万
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财政年份:1998
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负责人:Ellen Fisher
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依托单位:
Investigation of Plasma Deposition and Etching Mechanisms for Silicon-based Materials
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批准号:9812332
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项目类别:Continuing Grant
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资助金额:$32.6万
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财政年份:1998
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负责人:Ellen Fisher
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依托单位:
Investigation of Plasma Deposition Mechanisms for Silicon Dioxide and Silicon Nitride Films
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批准号:9501157
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项目类别:Continuing Grant
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资助金额:$24.8万
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财政年份:1995
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负责人:Ellen Fisher
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依托单位:
Surface Reactivity of Radicals During Plasma Deposition of Thin Films
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批准号:9409272
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项目类别:Standard Grant
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资助金额:$1.8万
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财政年份:1994
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负责人:Ellen Fisher
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依托单位:
国内基金
海外基金
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