Acquisition of an Integrated Scanning Electron Microscope System

购置集成扫描电子显微镜系统

• 批准号: 0114093
• 负责人: Ellen Fisher
• 金额: $ 30万
• 依托单位: Colorado State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-09-01 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0114093&HistoricalAwards=false
• 关键词: Acquisition; Integrated; Scanning; Electron; Microscope

This award from the Instrumentation for Materials Research program and the Major Research Instrumentation program to Colorado state University will fund the purchase of an integrated field emission scanning electron microscope (FE-SEM) system for the central Electron Microscopy Center at Colorado State University. The equipment requested will allow imaging specimens at high resolution, providing resolution of structures as small as 1.5 nanometers. An energy dispersive spectroscopy (EDS) system will allow chemical identification, with the capability of precisely mapping multiple elements over a wide area. A third component of the instrumentation will enable investigators to produce nanoscale devices using electron beam lithography. This technique, in conjunction with the high resolution FE-SEM will allow generation of structures as small as 10 nm for applications in optoelectronic materials, superconductors, and sensors. The instrumentation will support the research efforts of seven primary investigators from five departments across campus. In addition, it will be useed by research groups in 8 other departments at CSU as well as several other investigators (both academic and industrial) from along the Colorado Front Range. Finally, the FE-SEM will be used to support and extend the teaching mission of the EM center and the University through hands-on instruction and telepresence microscopy.This award from the Instrumentation for Material Research program and the Major Research Instrumentation program to Colorado State University will fund the purchase of an integrated system of imaging and analytical tools that will greatly expand the capabilities of the Electron Microscopy (EM) Center at Colorado State University. The state-of-the-art scanning electron microscope (SEM) will allow imaging of both biological and materials specimens at the highest magnifications currently possible. In addition, an x-ray analyzer attached to the microscope will provide identification of most elements in the periodic table and will map their locations with high precision on specimen surfaces. The electron beam lithography system, coupled with the SEM will allow production of micro- and nanoscopic structures that will be used in a variety of optical and electrical devices, such as light emitting diodes, semiconductor lasers, and highly efficient sensors and detectors. The educational mission of science and engineering departments across the CSU campus will also be enhanced by the acquisition of this instrumentation through hands-on instruction and remote access via telepresence microscopy.

材料研究仪器计划和主要研究仪器计划授予科罗拉多州立大学的这一奖项将为科罗拉多州立大学的中央电子显微镜中心购买集成场发射扫描电子显微镜（FE-SEM）系统提供资金。 所要求的设备将允许以高分辨率对样品进行成像，提供小至1.5纳米的结构分辨率。 能量色散光谱（EDS）系统将允许化学识别，具有在广泛区域内精确映射多种元素的能力。 仪器的第三个组成部分将使研究人员能够使用电子束光刻法生产纳米级器件。 该技术与高分辨率FE-SEM相结合，将允许生成小至10 nm的结构，用于光电材料，超导体和传感器。 该仪器将支持来自校园五个部门的七名主要研究人员的研究工作。 此外，它还将被科罗拉多州立大学其他8个部门的研究小组以及科罗拉多前线山脉沿着其他几个调查人员（学术和工业）使用。 最后，FE-SEM将用于支持和扩展EM中心和大学的教学使命，通过实践教学和远程呈现显微镜。材料研究仪器计划和主要研究仪器计划授予科罗拉多州立大学的这一奖项将资助购买成像和分析工具的集成系统，该系统将大大扩展电子显微镜的能力（EM）中心在科罗拉多州立大学。 最先进的扫描电子显微镜（SEM）将允许在目前可能的最高放大倍数下对生物和材料样本进行成像。 此外，连接到显微镜的X射线分析仪将提供周期表中大多数元素的识别，并将在样品表面上以高精度绘制它们的位置。 电子束光刻系统与SEM相结合，将允许生产微米和纳米级结构，这些结构将用于各种光学和电气设备，例如发光二极管，半导体激光器和高效传感器和检测器。 整个CSU校园的科学和工程部门的教育使命也将通过通过实践教学和远程访问通过远程呈现显微镜获得这种仪器来加强。