Development of MMIC Ferrite Devices

MMIC铁氧体器件的开发

• 批准号: 9900266
• 负责人: Carmine Vittoria
• 金额: $ 20.97万
• 依托单位: Northeastern University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-06-01 至 2003-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9900266&HistoricalAwards=false
• 关键词: Development; MMIC; Ferrite; Devices

9900266VittoriaWe propose to develop a novel technique for the fabrication of microwave monolithic integrated circuit (MMIC) ferrite devices by utilizing the thick film glass-ceramic technology to attach high quality ferrite slabs to silicon substrates. The thick glass-ceramic film technology is an established technology involved in the manufacturing of integrated circuits, computer interconnects, isolation chips, and hybrid microelectronic circuits, although it is rarely applied in conjunction with ferrite materials. For low frequency applications (2 - 18 GHz) we plan to use thick glass-ceramic films to attach single crystal YIG films to silicon substrates and for frequencies above 18 GHz we replace YIG with oriented Y-type ferrites for the first time. The research program entails preparation of oriented Y-type ferrites, microwave characterization, fabrication of MMIC devices, modeling of some basic microwave circuits and testing.***

9900266我们提出了一种新的技术，用于制造微波单片集成电路（MMIC）铁氧体器件，利用厚膜玻璃陶瓷技术，将高质量的铁氧体片附着到硅衬底上。 厚玻璃陶瓷膜技术是一项涉及集成电路、计算机互连、隔离芯片和混合微电子电路制造的成熟技术，尽管它很少与铁氧体材料结合应用。 对于低频应用（2 - 18 GHz），我们计划使用厚的玻璃陶瓷膜，以将单晶YIG膜附着到硅衬底上，对于18 GHz以上的频率，我们首次用定向Y型铁氧体取代YIG。 该研究计划包括定向Y型铁氧体的制备，微波表征，MMIC器件的制造，一些基本微波电路的建模和测试。