Ordering/Lithography in Glasses/Alloys

玻璃/合金订购/光刻

• 批准号: 0245702
• 负责人: John Spence
• 金额: $ 33.25万
• 依托单位: Arizona State University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-05-01 至 2007-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0245702&HistoricalAwards=false
• 关键词: Ordering; Lithography; Glasses; Alloys

This project addresses fundamental atomic level characterization, alloy ordering, and direct-write lithography. These activities are relevant to superconducting, semiconducting and optical nanos-tructures. The lithography approach utilizes a direct-write, inorganic process which uses the high-energy, 0.5nm diameter beam of a scanning transmission electron microscope (STEM) to convert doped silicate glass films to nanostructures, such as nanorings. Silicon nanodots and nanowires may also be formed. Patterned Ge and Nb nanorings in silicate glass (about 20nm in diameter) have been demonstrated. Arrays of nanorings (of various elements) will be fabricated in silicate films on silicon nitride membranes, and their semiconducting, superconducting and optical prop-erties measured. Calculations of optical properties of nanorings are in collaboration with F. Gar-cia de Abajo. The project also addresses formation of Josephson arrays and weak link fabrication via STEM. The general intellectual merit of the project lies in prospects for understanding, char-acterizing and forming atomic structures within thin films by new means in order to obtain wanted novel properties. These include electrical currents which circulate forever, media with negative optical refractive index, semiconductor quantum nanorings for computing and improved intermetallic alloys.%%% The project addresses fundamental materials science research issues associated with electronic materials having technological relevance. An important feature of the project is the strong em-phasis on education, and the integration of research and education. The project includes support of students, a planned exhibit at the Arizona Science Museum, visits to elementary and high schools in a specially equipped minibus, and laboratory tours for high school students (http://www.asu.edu/clas/csss/csss/).***

该项目致力于基本的原子级表征、合金排序和直写光刻。这些活动与超导、半导体和光学纳米结构有关。光刻方法采用直写无机工艺，利用扫描透射电子显微镜 (STEM) 的高能、直径 0.5 纳米的光束将掺杂硅酸盐玻璃薄膜转化为纳米结构，例如纳米环。还可以形成硅纳米点和纳米线。硅酸盐玻璃中的图案化 Ge 和 Nb 纳米环（直径约 20 nm）已得到证实。将在氮化硅膜上的硅酸盐薄膜中制造纳米环（各种元素）阵列，并测量它们的半导体、超导和光学特性。 纳米环光学特性的计算是与 F. Gar-cia de Abajo 合作进行的。该项目还解决了约瑟夫森阵列的形成和通过 STEM 的弱连接制造。该项目的一般智力价值在于通过新手段理解、表征和形成薄膜内原子结构以获得所需的新颖特性的前景。其中包括永远循环的电流、具有负光学折射率的介质、用于计算的半导体量子纳米环和改进的金属间合金。%%%该项目解决与具有技术相关性的电子材料相关的基础材料科学研究问题。该项目的一个重要特点是高度重视教育，以及研究与教育的融合。该项目包括对学生的支持、计划在亚利桑那科学博物馆举办的展览、乘坐特制小巴参观小学和高中以及高中生实验室参观 (http://www.asu.edu/clas/csss/csss/)。***