MEMS/NEMS Design Automation and Synthesis

我们建议以现有的MEMS（微机电系统）模拟器SUGAR为基础，将其转变为支持概念设计早期阶段的设计综合工具。我们的方法是开发广泛的MEMS构建模块和集群和组件的层次结构，可以集成到“MEMS/NEMS（微/纳米）设计自动化和合成”框架中，用于构建大范围的MEMS和亚微米器件。我们的目标是使MEMS和NEMS技术的适当扩展广泛应用于大学和小型企业。具体任务是为MEMS/NEMS设计开发一套扩展的模块化构建模块，并为SUGAR MEMS模拟器创建相应的工程模型。利用现有设计的案例库，我们将构建这些MEMS构建模块，集群和设计示例的索引库的原型。探索性MEMS合成环境将基于随机搜索算法，为进一步的确定性改进、制造、测试和评估产生概念设计。在第三年将提出可扩展性和扩展到纳米级设计（NEMS）的建议。为了产生更广泛的影响，我们将通过源代码、网络服务和教育研讨会免费提供对SUGAR的修订。

We propose to build on the existing MEMS (micro-electromechanical systems) simulator, SUGAR, and turn it into a design synthesis tool that supports the early stages of conceptual design. Our approach is to develop a broad base of MEMS building blocks and hierarchies of clusters and assemblies that can be integrated into a "MEMS/NEMS (micro/nano) Design Automation and Synthesis" framework for constructing a large range of MEMS and submicron devices. Our goal is to make MEMS and appropriate extensions to NEMS technology widely accessible to universities and small businesses.Specific tasks are to develop an expanded set of modular building blocks for MEMS/NEMS design and to create corresponding engineering models for the SUGAR MEMS simulator. Using a case base of existing designs, we will build a prototype of an indexed library of these MEMS building blocks, clusters and design examples. An exploratory MEMS synthesis environment will be based on stochastic search algorithms that will produce conceptual designs for further deterministic refinement, fabrication, testing and evaluation. During the third year will make recommendations for scalability and extension to nano-scale designs (NEMS). To achieve broad impact, we will make our revisions to SUGAR freely available through source code, a web service and educational workshops.