MRI: Acquisition of a Lithography Enabled SEM and Nanoimprinter for the Fabrication of Nanostructures

MRI：购买支持光刻的 SEM 和纳米压印机，用于制造纳米结构

• 批准号: 0421086
• 负责人: Mark Lonergan
• 金额: $ 40.21万
• 依托单位: University of Oregon Eugene
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-09-01 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0421086&HistoricalAwards=false
• 关键词: MRI; Acquisition; Lithography; Enabled; SEM

This award is to the University of Oregon to acquire a thermal field emission scanning electron microscope configured for dedicated electron beam lithography and a nano-imprint lithography system. This highlycomplementary equipment will be housed in the Center for Advanced Materials Characterization in Oregon (CAMCOR), which serves the research community in Oregon and the Pacific Northwest. The instrumentationwill have a broad impact by greatly enhancing the regions infrastructure for the top-down lithographic fabrication of nanostructures. The equipment will immediately impact seven materials-related researchgroups in chemistry, physics, and engineering departments at the University of Oregon, Oregon State University and Portland State University. The research of these groups are addressing fundamentalprinciples underlying molecular motors, charge transport through nanostructures, and the flow of light at the nanometer scale, as well as methods for the fabrication of functional micro- and nanostructures forapplications in sensing and distributed energy and chemical systems. These studies will all ultimately contribute to the development of new types of functional materials and devices. The instrumentation willalso be used in a number of specialized undergraduate and graduate level programs focused on materials chemistry and physics underlying the operation and fabrication of semiconductor devices. This award is to the University of Oregon to acquire a thermal field emission scanning electron microscope configured for dedicated electron beam lithography and a nano-imprint lithography system. This equipmentis used for the fabrication and reproduction of well defined structures with nanometer scale features. Such structures will be used by researchers throughout the region in their efforts to understand nanoscale matter. The fundamental understanding of such matter will contribute to advancing the state-of-the-art in a variety of applications ranging from new types of electronic and optical devices to efficient chemical manufacturing methods. The equipment made possible by this award will have a substantial impact on educating undergraduate and graduate students at the chemistry, physics, and engineering interface through its use in original scientific research, laboratory-based courses, and undergraduate summer science experiences.

该奖项授予俄勒冈州大学，以获得专用电子束光刻和纳米压印光刻系统配置的热场发射扫描电子显微镜。 这种高度互补的设备将被安置在俄勒冈州的先进材料表征中心（CAMCOR），该中心为俄勒冈州和太平洋西北部的研究社区提供服务。 仪器将有广泛的影响，极大地提高了该地区的基础设施，自上而下的光刻制造纳米结构。 该设备将立即影响俄勒冈州大学、俄勒冈州州立大学和波特兰州立大学的化学、物理和工程系的七个材料相关研究小组。 这些小组的研究是解决分子马达的基本原理，通过纳米结构的电荷传输，以及纳米尺度的光的流动，以及用于传感和分布式能源和化学系统中的应用的功能性微米和纳米结构的制造方法。 这些研究最终将有助于开发新型功能材料和器件。 该仪器也将用于一些专业的本科生和研究生水平的课程，重点是材料化学和物理基础的操作和半导体器件的制造。该奖项授予俄勒冈州大学，以获得专用电子束光刻和纳米压印光刻系统配置的热场发射扫描电子显微镜。 该设备用于制造和复制具有纳米尺度特征的良好定义的结构。 这种结构将被整个地区的研究人员用于理解纳米级物质。对这种物质的基本理解将有助于推进从新型电子和光学设备到高效化学制造方法等各种应用中的最新技术。 该奖项所提供的设备将通过在原创科学研究、实验室课程和本科生暑期科学体验中的使用，对化学、物理和工程界面的本科生和研究生教育产生重大影响。