CRI: MEMS Integration Infrastructure

路易斯安那大学拉斐特分校将获得CMOS-MEMS制造和表征所需的设备；该设备包括带相机的立体显微镜、轮廓仪、锁相放大器、低失真函数发生器、示波器、频谱分析仪和逻辑分析仪。该大学高级计算机研究中心的VLSI研究小组将对片上系统（SOC）进行研究，该系统被视为集成异构技术，其技术范围包括混合信号CMOS， CMOS- mems和光学器件，如vcsels等在单个芯片或封装上。制造设备的应用包括传感器和机器人。该基础设施将用于该大学的研究、研究培训和教育。调查人员将与现有项目合作，包括麦克奈尔学者和路易斯·斯托克斯路易斯安那州少数民族参与联盟，以增加代表性不足的学生在相关学位课程中的参与。

The University of Louisiana at Lafayette will acquire equipment needed for CMOS-MEMS fabrication and characterization; the equipment includes a stereoscopic microscope with camera, a profilometer, a lock-in amplifier, a low distortion function generator, an oscilloscope, a spectrum analyzer, and a logic analyzer. The VLSI research group at the University's Center for Advanced Computer Studies will conduct research on Systems-on-a-chip (SOC) viewed as integrated heterogeneous technologies where the technologies range over mixed signal CMOS, CMOS-MEMS and optical devices such asVCSELs etc. on a single die or package. Applications of fabricated devices include sensors and robotics. The infrastructure will be used in research, research training and education at the University. The investigators will partner with existing programs, including McNair Scholars and the Louis Stokes Louisiana Alliance for Minority Participation to increase the participation of under-represented students in related degree programs.