CRI: MEMS Integration Infrastructure

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The University of Louisiana at Lafayette will acquire equipment needed for CMOS-MEMS fabrication and characterization; the equipment includes a stereoscopic microscope with camera, a profilometer, a lock-in amplifier, a low distortion function generator, an oscilloscope, a spectrum analyzer, and a logic analyzer. The VLSI research group at the University's Center for Advanced Computer Studies will conduct research on Systems-on-a-chip (SOC) viewed as integrated heterogeneous technologies where the technologies range over mixed signal CMOS, CMOS-MEMS and optical devices such asVCSELs etc. on a single die or package. Applications of fabricated devices include sensors and robotics. The infrastructure will be used in research, research training and education at the University. The investigators will partner with existing programs, including McNair Scholars and the Louis Stokes Louisiana Alliance for Minority Participation to increase the participation of under-represented students in related degree programs.